Amorphous
carbon thin films are technologically important materials
that range in use from the semiconductor industry to corrosion-resistant
films. Their conversion to crystalline graphene layers has long been
pursued; however, typically this requires excessively high temperatures.
Thus, crystallization routes which require reduced temperatures are
important. Moreover, the ability to crystallize amorphous carbon at
reduced temperatures without a catalyst could pave the way for practical
graphene synthesis for device fabrication without the need for transfer
or post-transfer gate deposition. To this end we demonstrate a practical
and facile method to crystallize deposited amorphous carbon films
to high quality graphene layers at reduced annealing temperatures
by introducing oxidizing gases during the process. The reactive gases
react with regions of higher strain (energy) in the system and accelerate
the graphitization process by minimizing criss-cross-linkages and
accelerating C–C bond rearrangement at defects. In other words,
the movement of crystallite boundaries is accelerated along the carbon
hexagon planes by removing obstacles for crystallite coalescence.