2022
DOI: 10.3390/s22155905
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The Characteristics Analysis of a Microfluid-Based EGFET Biosensor with On-Chip Sensing Film for Lactic Acid Detection

Abstract: In this research, a microfluid-based extended gate field-effect transistor (EGFET) biosensor with an on-chip sensing window (OCSW) was fabricated. The detection window was composed of six metal layers, and a ruthenium dioxide (RuO2) film was spattered on the surface and functionalized with lactase to detect lactic acid (LA). To detect LA in a more diversified way, a microfluidic system was integrated with the biosensor. Moreover, a special package was used to seal the sensing window and microfluidic tube and i… Show more

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Cited by 6 publications
(2 citation statements)
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“…Other models that have also emerged are those with sequential detection windows, as reported by Kuo et al [61]. In this study, a device was made up of six aluminum metallic structures to prevent a measurement with only one recognition structure from collapsing the probe port and damaging the sensor (Figure 9).…”
Section: Devices With Non-electrical Counterpartsmentioning
confidence: 92%
“…Other models that have also emerged are those with sequential detection windows, as reported by Kuo et al [61]. In this study, a device was made up of six aluminum metallic structures to prevent a measurement with only one recognition structure from collapsing the probe port and damaging the sensor (Figure 9).…”
Section: Devices With Non-electrical Counterpartsmentioning
confidence: 92%
“…While in an ISFET, the metal gate of the MOSFET is replaced by an ion-sensing film, an electrolyte solution, and a reference electrode, the EGFET retains the complete MOSFET structure, but the gate is extended for the connection to the metal-sensing film electrolyte solution and the reference electrode. Kuo and coworkers use CMOS technology to fabricate a biosensor for the detection of acid lactic [12]. The sensor uses an EGFET with a sensing window on an extended gate composed of a RuO 2 film sputtered on six metal layers and functionalized with lactase.…”
Section: Overview Of Contributionsmentioning
confidence: 99%