This article investigates improving organic thin-film transistor ͑OTFT͒ characteristics by using an alignable high dielectric constant film to control the self-organization of pentacene molecules. The process, based on the growth of a pentacene film with high vacuum sublimation, is a method of self-organization that uses ion-beam ͑IB͒ bombardment of the HfO 2 /Al 2 O 3 surface that serves as the gate dielectric layer. X-ray photoelectron spectroscopy indicates that the IB increases the structural anisotropy of the HfO 2 /Al 2 O 3 film, and X-ray diffraction patterns show that increasing the anisotropy may lead to the self-organization of pentacene molecules in the first polarized monolayer. An effective mobility of 2.3 ϫ 10 −3 cm 2 V −1 s −1 was achieved, which is significantly different from the mobility in pentacene films that are not aligned. The proposed OTFT devices with an ultrathin HfO 2 structure as the gate dielectric layer were operated at a gate voltage lower than 5 V.The performance of organic thin-film transistors ͑OTFTs͒, as characterized by such parameters as field-effect mobility, modulated on/off current ratio, and threshold voltage, depends in part on the molecular structure of the semiconducting film. Thus several studies focused on improving the performance of pentacene-based thin-film transistors ͑TFTs͒ have sought to optimize growth conditions, such as deposition rate, roughness, and the surface treatment. In particular, recent attempts to improve the field-effect mobility in pentacenebased TFTs have involved pentacene-ordering methods. 1-5 The carrier mobility in an OTFT should be enhanced if the pentacene molecules can be aligned so as to increase the -orbital overlap along the direction of current flow. Therefore methods such as friction transfer, rubbing, photoalignment, and imprinting lithography have been developed to fabricate an aligned layer. These methods all have certain limitations, however, such as requiring a supplemental photoalignment layer and being complicated processes that require high voltages for their operation.To solve these problems, this article introduces a process of ionbeam ͑IB͒-induced pentacene alignment on ultrathin HfO 2 /Al 2 O 3 double layers. To obtain a high quality alignment layer, we grow HfO 2 /Al 2 O 3 layers by atomic layer deposition ͑ALD͒, which has the advantages of excellent control of layer thickness as well as good conformity and uniformity. 6-9 This added buffer layer forms a HfO 2 /Al 2 O 3 dielectric structure, which reduces the negative effects of the bottom interface, such as excessive leakage current or poor gate dielectric reliability. This has an effect not only on the control of the threshold voltage but also on the electronic structure of the interface between the dielectric layers and the organic semiconductor. Experimental results indicate that using the IB-treated high-k multilayers results in good device performance, low driving voltages, and enhanced field-effect mobilities.
ExperimentalAn IB-treated HfO 2 surface was used as an ...