The characteristics of laser micro drilling using a Bessel beam

Matsuoka, Yoshihiko; Kizuka, Yuko; Inoue, Takashi

doi:10.1007/s00339-006-3629-6

Cited by 143 publications

(56 citation statements)

References 13 publications

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“…10,26,27 This is of great importance for technological considerations, especially when ablation along the channel is achieved. It offers the possibility for direct microchannel drilling 10,28 and ultrahigh precision cutting of transparent dielectrics. 29,30 In silicon, the material response is drastically different.…”

Section: B Comparison To Silicon Materials Responsementioning

confidence: 99%

Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared

Grojo

Mouskeftaras

Delaporte

et al. 2015

Journal of Applied Physics

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We produce and characterize high-angle femtosecond Bessel beams at 1300-nm wavelength leading to nonlinearly ionized plasma micro-channels in both glass and silicon. With microjoule pulse energy, we demonstrate controlled through-modifications in 150-lm glass substrates. In silicon, strong two-photon absorption leads to larger damages at the front surface but also a clamping of the intensity inside the bulk at a level of %4 Â 10 11 W cm À2 which is below the threshold for volume and rear surface modification. We show that the intensity clamping is associated with a strong degradation of the Bessel-like profile. The observations highlight that the inherent limitation to ultrafast energy deposition inside semiconductors with Gaussian focusing [Mouskeftaras et al., Appl. Phys. Lett. 105, 191103 (2014)] applies also for high-angle Bessel beams. V C 2015 AIP Publishing LLC. [http://dx

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Section: B Comparison To Silicon Materials Responsementioning

confidence: 99%

Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared

Grojo

Mouskeftaras

Delaporte

et al. 2015

Journal of Applied Physics

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“…Many researchers have paid much attention to the microhole drilling and micro-cutting using fs lasers, including both transparent materials [1][2][3][4][5][6][7][8][9] and nontransparent materials. [10][11][12][13][14][15] Especially for transparent materials, different methods have been used to generate high-aspect-ratio micro-holes such as combination with chemical etching, 4,5 beam shaping, 2,6 and liquid-assisted drilling from rear surface.…”

Section: Introductionmentioning

confidence: 99%

“…[10][11][12][13][14][15] Especially for transparent materials, different methods have been used to generate high-aspect-ratio micro-holes such as combination with chemical etching, 4,5 beam shaping, 2,6 and liquid-assisted drilling from rear surface. 1,3,7 However, the fs laser sources, generally, are traditional solid-state lasers, which are expensive, bulky, and need regular maintenance.…”

Section: Introductionmentioning

confidence: 99%

Micro-hole drilling and cutting using femtosecond fiber laser

2014

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Abstract. Micro-hole drilling and cutting in ambient air are presented by using a femtosecond fiber laser. At first, the micro-hole drilling was investigated in both transparent (glasses) and nontransparent (metals and tissues) materials. The shape and morphology of the holes were characterized and evaluated with optical and scanning electron microscopy. Debris-free micro-holes with good roundness and no thermal damage were demonstrated with the aspect ratio of 8∶1. Micro-hole drilling in hard and soft tissues with no crack or collateral thermal damage is also demonstrated. Then, trench micromachining and cutting were studied for different materials and the effect of the laser parameters on the trench properties was investigated. Straight and clean trench edges were obtained with no thermal damage.

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“…In fact, the BB beam size is not fully free from diffraction since its FWHM will be greater than half a wavelength. Potential applications of BBs include optical manipulation [6,7], femtosecond laser submicrochannel machining [8,9], and nonlinear microscopy in dense media [10]. Recent progress in theory and applications of BBs may be found in [11] and [12].…”

Section: Introductionmentioning

confidence: 99%

Subwavelength Bessel beams in wire media

Zapata–Rodríguez

Miret

2013

J. Opt. Soc. Am. B

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Recent progress is emerging on nondiffracting subwavelength fields propagating in complex plasmonic nanostructures. In this paper, we present a thorough discussion on diffraction-free localized solutions of Maxwell's equations in a periodic structure composed of nanowires. This self-focusing mechanism differs from others previously reported, which lie on regimes with ultraflat spatial dispersion. By means of the Maxwell-Garnett model, we provide a general analytical expression of the electromagnetic fields that can propagate along the direction of the cylinder's axis, keeping its transverse waveform unaltered. Numerical simulations based on the finite element method support our analytical approach. In particular, moderate filling fractions of the metallic composite lead to nonresonant-plasmonic spots of light propagating with a size that remains far below the limit of diffraction.

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The characteristics of laser micro drilling using a Bessel beam

Cited by 143 publications

References 13 publications

Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared

Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared

Micro-hole drilling and cutting using femtosecond fiber laser

Subwavelength Bessel beams in wire media

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