The chemical vapor deposition chamber design to improve the thin film deposition quality in both 12&amp;#x2033; (300 mm) and 18&amp;#x2033; (450 mm) wafers with the development of 3D chamber modeling and experimental visual technique

Liao, Ming-Han; Chen, Chih-Hua; Kao, Shih-Han; Huang, Ming‐Bao

doi:10.1109/emdc.2013.6756036

2013 E-Manufacturing &Amp; Design Collaboration Symposium (eMDC) 2013

DOI: 10.1109/emdc.2013.6756036

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The chemical vapor deposition chamber design to improve the thin film deposition quality in both 12″ (300 mm) and 18″ (450 mm) wafers with the development of 3D chamber modeling and experimental visual technique

Ming-Han Liao

Chih-Hua Chen

Shih-Han Kao

et al.

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The chemical vapor deposition chamber design to improve the thin film deposition quality in both 12″ (300 mm) and 18″ (450 mm) wafers with the development of 3D chamber modeling and experimental visual technique

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References 12 publications

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