The CMP effect of Potassium Molybdate with BTA as Compound Corrosion Inhibitor used in CMP of the TSV Heterogeneous Microstructure

Wang, Bingquan; Li, Changkun; Liu, Yuhong; Lu, Xinchun

doi:10.1109/cstic.2019.8755654

Cited by 1 publication

(1 citation statement)

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“…The RMS roughness value of the samples DBDA_1, DBDA_2 and DBDA_3 is 2.09 nm, 2.62 nm and 2.70 nm respectively, which is comparable with the results presented earlier [ 39 ]. A decrease in the RMS roughness parameter value should lead to improvement in the barrier properties of the deposited coatings [ 40 ].…”

Section: Resultsmentioning

confidence: 99%

Fabrication and Characterization of Thin Metal Films Deposited by Electroless Plating with Organic Additives for Electrical Circuits Applications

Buylov,

Sotskaya,

Kozaderov

et al. 2023

Micromachines

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In our work, we studied thin nickel films deposited by electroless plating for use as a barrier and seed layer in the through-silicon vias (TSV) technology. El-Ni coatings were deposited on a copper substrate from the original electrolyte and with the use of various concentrations of organic additives in the composition of the electrolyte. The surface morphology, crystal state, and phase composition of the deposited coatings were studied by SEM, AFM, and XRD methods. The El-Ni coating deposited without the use of an organic additive has an irregular topography with rare phenocrysts of globular formations of hemispherical shape and a root mean square roughness value of 13.62 nm. The phosphorus concentration in the coating is 9.78 wt.%. According to the results of the X-ray diffraction studies of El-Ni, the coating deposited without the use of an organic additive has a nanocrystalline structure with an average nickel crystallite size of 2.76 nm. The influence of the organic additive is seen in the smoothening of the samples surface. The root mean square roughness values of the El-Ni sample coatings vary within 2.09–2.70 nm. According to microanalysis data the phosphorus concentration in the developed coatings is ~4.7–6.2 wt.%. The study of the crystalline state of the deposited coatings by X-ray diffraction made it possible to detect two arrays of nanocrystallites in their structure, with average sizes of 4.8–10.3 nm and 1.3–2.6 nm.

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Section: Resultsmentioning

confidence: 99%