Nine organotin fluorocarboxylates R n SnO 2 CR f (n = 3, R = Bu, R f = CF 3 , C 2 F 5 , C 3 F 7 , C 7 F 15 ; R = Et, R f = CF 3 , C 2 F 5 ; R = Me, R f = C 2 F 5 ; n = 2, R = Me, R f = CF 3 ) have been synthesized; key examples have been used to deposit fluorine-doped SnO 2 thin films by atmospheric pressure chemical vapour deposition. Et 3 SnO 2 CC 2 F 5 , in particular, gives high-quality films with fast deposition rates despite adopting a polymeric, carboxylate-bridged structure in the solid state, as determined by X-ray crystallography. Gas-phase electron diffraction on the model compound Me 3 SnO 2 CC 2 F 5 shows that accessible conformations do not allow contact between tin and fluorine, and that direct transfer is therefore unlikely to be part of the mechanism for fluorine incorporation in SnO 2 films. The structure of Me 2 Sn(O 2 CCF 3 ) 2 (H 2 O) has also been determined and adopts a trans-Me 2 SnO 3 coordination sphere about tin in which each carboxylate group is monodentate.