2020
DOI: 10.1063/1.5140456
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The Cu photoluminescence defect and the early stages of Cu precipitation in Si

Abstract: This theoretical–experimental study focuses on the formation of the substitutional-tri-interstitial cluster Cus1Cui3, which has been proposed as the photoluminescence defect CuPL. The configurations and electronic properties of the intermediate defects Cus1Cui1 and Cus1Cui2 are calculated, and their electrically active levels are obtained from conventional and Laplace deep-level transient spectroscopy. The vacancy formation energy near copper-related defects is calculated and found to be much smaller than in t… Show more

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Cited by 6 publications
(5 citation statements)
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“…The spectrum was dominated by the peak at 105 K due to the Cunormals second acceptor level. [ 4,12,13 ] (Hereafter, the DLTS peak positions are given for the rate window of 49 normals1.) The Cu185 and Cu145 peaks were formed in the near‐surface region due to acid chemical etching and ascribed earlier to Cu−H and Cu−H 2 complexes, respectively.…”
Section: Resultsmentioning
confidence: 99%
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“…The spectrum was dominated by the peak at 105 K due to the Cunormals second acceptor level. [ 4,12,13 ] (Hereafter, the DLTS peak positions are given for the rate window of 49 normals1.) The Cu185 and Cu145 peaks were formed in the near‐surface region due to acid chemical etching and ascribed earlier to Cu−H and Cu−H 2 complexes, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…[ 12 ] In the as‐received samples, almost no deep levels were revealed in the upper half of the bandgap, as all Cunormals atoms were consumed to form CuPL complexes with a single level close to the valence band. [ 4 ] Therefore, all samples were first subjected to a 350 °C annealing for 30–40 min, which was terminated by fast cooling in air. This treatment destroyed the CuPL complexes, and the second acceptor level of Cunormals at Enormalc 0.16 eV [ 13,14 ] was detected in concentration of (710) × 1013cm3.…”
Section: Methodsmentioning
confidence: 99%
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“…However, even for the simplest type Cu (s) , the identification of the electronic levels among many observed levels has not been accomplished with certification, although recent development of density-functional-theory (DFT) calculations help with the identification. [22][23][24][25][26] The high reactivity of Cu atoms with other defects, 17,[27][28][29][30] whether intentionally introduced or not, make the identification difficult.…”
Section: Introductionmentioning
confidence: 99%