“…H 2 O, N 2 , O 2 ), the decomposition products of HFC125 at evaluated temperature may include HF, COF 2 , CF 3 CF, CF 2 CF 2 , CHF 3 , CF 2 , CHF 2 and CF; [2][3][4] those of SF 6 may include S 2 OF 10 , SO 2 , S 2 F 10 , SF 4 , SO 2 F 2 , SOF 2 , SOF 4 , F 2 , S 2 O 2 F 10 , H 2 S, HF and F 2 O. 4,5) HFC125 and SF 6 become corrosive at high temperature because most of these thermal decomposition products are corrosive.…”