The Design, Fabrication, and Testing of an Electromagnetic Micropump with a Matrix-Patterned Magnetic Polymer Composite Actuator Membrane

Said, Muzalifah Mohd; Yunas, Jumril; Bais, Badariah; Hamzah, Azrul Azlan; Majlis, Burhanuddin Yeop

doi:10.3390/mi9010013

Cited by 35 publications

(13 citation statements)

References 26 publications

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“…The flow rate was 36.1 nl min −1 , which was estimated by image processing. Although the measured flow rate of this prototype is higher than that of previous micropump using similar membrane property [33], it is significantly lower than that of the other previous micropumps [5,6]. To utilize the proposed micropump for practical applications, there is need for evaluation of the high-precision/-reliability/-repeatability demonstrated by the measurement of the flow rate for various back pressure.…”

Section: Evaluation Of Micropumpmentioning

confidence: 84%

Self-aligned fabrication process for active membrane in magnetically driven micropump using photosensitive composite

Nakahara¹,

Ueda²,

Miyagawa³

et al. 2020

J. Micromech. Microeng.

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In this paper, we propose a simple fabrication process for an active membrane utilised in the manufacture of micropumps using a photosensitive composite. The composite is developed from a mixture of a negative photoresist (SU-8) and magnetic particles. We evaluated the magnetisation and attractive force of the composites made of Fe 3 O 4 , Ni, or Fe. In our experiment, the composite made of Fe (50 wt%) demonstrated the maximum values for magnetisation and attractive force, which were 300 kA m −1 and 2.7 mN, respectively. The processability of the composite (Fe: 50 wt%) showed a saturated exposure thickness of approximately 25 µm, which was caused by the low transmittance for ultraviolet light in the exposure process. We fabricated a micropump using a simple process, which included the manufacture of both of an active membrane and a hollow structure in a one-step self-aligned photolithography process using above processability of the composite. The fabricated device demonstrated that the displacement of the membrane increased with the increase in the applied magnetic field from 10 kA m −1 to 90 kA m −1 . The maximum displacement was 4.2 µm at 5 Hz in an applied magnetic field of 90 kA m −1 . The flow rate of the micropump was evaluated by particle tracking method and the result was 36.1 nl min −1 at 5 Hz in 90 kA m −1 .

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Section: Evaluation Of Micropumpmentioning

confidence: 84%

Self-aligned fabrication process for active membrane in magnetically driven micropump using photosensitive composite

Nakahara¹,

Ueda²,

Miyagawa³

et al. 2020

J. Micromech. Microeng.

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“…In the effort to make the structure intrinsically soft and squishy, we have used flexible magnets and elastomers mixed with ferromagnetic materials for the purpose of actuation. [ 19 ] The electromagnetic actuators have so far been mainly been used for actuation purposes, [ 20 ] with primary applications in micropumps, [ 21 ] and tactile displays. [ 22 ] In this regard, the actuator with intrinsic touch sensing presented here through SensAct device is a significant advance.…”

Section: Introductionmentioning

confidence: 99%

SensAct: The Soft and Squishy Tactile Sensor with Integrated Flexible Actuator

Ozioko

Karipoth

Escobedo

et al. 2021

Advanced Intelligent Systems

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Herein, a novel tactile sensing device (SensAct) with a soft touch/pressure sensor seamlessly integrated on a flexible actuator is presented. The squishy touch sensor is developed with custom‐made graphite paste on a tiny permanent magnet, encapsulated in Sil‐Poxy, and the actuator (15 μ‐thick coil) is fabricated on polyimide by Lithographie Galvanoformung Abformung (LIGA) micromolding method. The actuator can operate in two modes (expansion and contraction/squeeze) and two states (vibration and nonvibration). The sensor was tested with up to 12 N applied forces and exhibited ≈70% average relative resistance variation (ΔR/Ro), ≈0.346 kPa−1 sensitivity, and ≈49 ms response time with excellent repeatability (≈12.7% coefficient of variation) at 5 N. During simultaneous sensing and actuation, the modulation of coil current, due to ΔR/Ro (≈14% at 2 N force) in the sensor, allows the close loop control (ΔI/Io ≈385%) of expansion/contraction (≈69.8 μm expansion in nonvibration state and ≈111.5 μm peak‐to‐peak in the vibration state). Finally, the soft sensor is embedded in the 3D‐printed fingertip of a robotic hand to demonstrate its use for pressure mapping along with remote vibrotactile stimulation using SensAct device. The self‐controllable actuation of SensAct could provide eSkin the ability to tune stiffness and the vibration states could be utilized for controlled haptic feedback.

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“…Magnetic PDMS is the most commonly encountered due to the microfabrication properties of PDMS by soft lithography and the massive use of the latter for the realization of microfluidic systems. Thus, a large panel of microfluidic functionalities for fluid sample handling has emerged employing composite polymers, such as micro-valves, micro-pumps, or micro-mixers for microfluidic flow control [36,40,[42][43][44][45][46][47]; dynamic artificial cilia [41,[48][49][50]; and reversible microchannel bonding [51]. Ferrofluids were also explored for actuation in microfluidic systems [52][53][54][55].…”

Section: Introductionmentioning

confidence: 99%

Magnetic Polymers for Magnetophoretic Separation in Microfluidic Devices

et al. 2021

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Magnetophoresis offers many advantages for manipulating magnetic targets in microsystems. The integration of micro-flux concentrators and micro-magnets allows achieving large field gradients and therefore large reachable magnetic forces. However, the associated fabrication techniques are often complex and costly, and besides, they put specific constraints on the geometries. Magnetic composite polymers provide a promising alternative in terms of simplicity and fabrication costs, and they open new perspectives for the microstructuring, design, and integration of magnetic functions. In this review, we propose a state of the art of research works implementing magnetic polymers to trap or sort magnetic micro-beads or magnetically labeled cells in microfluidic devices.

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The Design, Fabrication, and Testing of an Electromagnetic Micropump with a Matrix-Patterned Magnetic Polymer Composite Actuator Membrane

Cited by 35 publications

References 26 publications

Self-aligned fabrication process for active membrane in magnetically driven micropump using photosensitive composite

Self-aligned fabrication process for active membrane in magnetically driven micropump using photosensitive composite

SensAct: The Soft and Squishy Tactile Sensor with Integrated Flexible Actuator

Magnetic Polymers for Magnetophoretic Separation in Microfluidic Devices

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