1981
DOI: 10.1149/1.2127581
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The Detection of Corrosion Phenomena with pH‐Sensitive Fluorescent Dyes on Aluminum‐ and Gold‐Metallized IC Devices

Abstract: Corrosion sites on IC devices are often difficult to detect before a significant amount of metallization deterioration occurs. The identification of corrosion sites in their early stages would be a powerful tool in studies of metallized IC device reliability and of corrosion processes themselves. Recently, this laboratory has been investigating metallization corrosion phenomena on IC devices. During these studies we explored the use of pH‐sensitive fluorescent dyes to decorate the IC device surface. After appl… Show more

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Cited by 13 publications
(10 citation statements)
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“…On the one hand, the process leads to a more acidic milieu at the anode (pH ≪ 7) due to the production of H + -ions, on the other hand, it increases the pH at the cathode (pH ≫ 7) leading to a more basic milieu (see Fig. 1) [9,13,25]. The local pH of the solution has a big influence on the corrosion of metals.…”
Section: Special Issue On International Seminar On Power Semiconductomentioning
confidence: 99%
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“…On the one hand, the process leads to a more acidic milieu at the anode (pH ≪ 7) due to the production of H + -ions, on the other hand, it increases the pH at the cathode (pH ≫ 7) leading to a more basic milieu (see Fig. 1) [9,13,25]. The local pH of the solution has a big influence on the corrosion of metals.…”
Section: Special Issue On International Seminar On Power Semiconductomentioning
confidence: 99%
“…Bare Al is known to be very reactive and builds up an aluminium hydroxide (Al(OH) 3 ) layer on its surface when getting in contact with water, thus, providing excellent oxidation resistance [11][12][13][14][28][29][30]. However, the Pourbaix diagram of Al indicates thermodynamic stability is given in region III (between pH 4 and 9) only.…”
Section: Al Corrosionmentioning
confidence: 99%
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“…The charge passed at the point of detection is then a total charge, Q TOT , which is equal to (N x Q DET ), where Q DET is the critical charge required for detection of each single spot. The previous analysis can thus be modified: (5) log (t DET / N) = log Q DET -log I APP (6) According to this analysis, a plot of log (t DET /N) vs. log I APP should have a slope of -1, and an intercept that provides a value of detectable charge, Q DET . Figure 13 shows the data replotted in this fashion, along with a fitted line with slope -1.…”
Section: Sensitivity Determinationmentioning
confidence: 99%
“…Although there are still technical challenges associated with corrosion indicating coatings, they are showing great promise for industrial applications. [5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20][21] Conductive polymers and surface modified nanoparticles have been studied as potential materials for inhibitor controlled-release applications. [22][23][24][25][26][27] Self healing coatings are another new development in material design that is important to corrosion control.…”
Section: Introductionmentioning
confidence: 99%