1975
DOI: 10.1002/pssa.2210310251
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The determination of foil thickness by scanning transmission electron microscopy

Abstract: A simple and accurate method of determining foil thickness is described. The method makes use of measurements of the spacing of intensity oscillations in convergent beam diffraction patterns obtained with commercial scanning transmission electron microscopes. Extension of the technique to determination of extinction distances and anomalous absorption parameters required for the two‐beam dynamical theory is outlined briefly.

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Cited by 557 publications
(155 citation statements)
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“…19) The number density of dislocations in a given area A on a negative micrograph was thus determined using eq. (2):…”
Section: Dislocation Analysismentioning
confidence: 99%
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“…19) The number density of dislocations in a given area A on a negative micrograph was thus determined using eq. (2):…”
Section: Dislocation Analysismentioning
confidence: 99%
“…19) Figure 7 shows typical examples of CBED patterns recorded from (a) Al-10Mg and (b) Al-10Mg-0.5Ag (mass%) alloys in the as-quenched condition. The two beam condition was selected with the electron beam parallel to h110i and an operating vector g ¼ 220.…”
Section: Measurement Of Foil Thicknessmentioning
confidence: 99%
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“…The number of cavities and their area and volume were obtained by counting and sizing them in cross-section images; these quantities were normalized to the fiont wafer area by measuring specimen thickness using diffiaction thickness fiinges [13] or convergent-beam diffiaction methods [18]. A size distribution with 2 nm increments was made using each cavity's largest observed diameter, since it is readily identified for all cavities.…”
Section: Cavity Evolution and Thermal Stabilitymentioning
confidence: 99%
“…The widest part of the extinction band changes from being close to the central beam in Fig. 4 Napier (1975). The crystal thickness for the pattern in Fig.…”
Section: Convergent-beam Diffractionmentioning
confidence: 87%