“…The biaxial strain model has been widely used to study the in-plane strains at the film/substrate and heterostructures interfaces . It can be decomposed into a sum of a uniaxial and a hydrostatic strain component, both of them being important tunable parameters in the strain-induced band gap engineering and having significant effects on the band structures. − For the textured or single crystalline-like films, the needed diffraction peaks are difficult to observe in the standard Bragg–Brentano geometry, so many other modified sin 2 ψ methods and the grazing-incidence XRD techniques have been developed to overcome these problems. − If the triaxial strains or the strain gradients along the surface normal present in the samples, the relationship between the strain along the diffraction direction ε φψ and sin 2 ψ will violate the linear variation, and the biaxial strain model may fail to describe these situations, such as the observed oscillatory ε φψ –sin 2 ψ curve caused by the crystallographic texture and the curvature-dependent ε φψ –sin 2 ψ curve resulting from the strain gradients normal to the surface. Many mathematical analysis methods have been developed to quantify and classify these inhomogeneous strains within the sample. ,, For a thorough review of strain/stress analysis by XRD, we refer to the works by I. C. Noyan et al and U. Welzel et al…”