The determination of the structure and composition at interfaces to atomic resolution

Boothroyd, C. B.; Baxter, C. S.; Bithell, Erica G.; Hÿtch, Martin; Ross, Frances M.; Sato, Kazunori; Stobbs, W. M.

doi:10.1016/0304-3991(89)90227-1

Cited by 3 publications

(1 citation statement)

References 21 publications

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“…Although Gaussian functions were used here, other functions could easily be incorporated into the fitting program. FCA works best for narrow boundaries (Boothroyd et al ., 1989). As well as having a lower inherent resolution, EFTEM is more sensitive to experimental limitations to the resolution such as alignment and focusing errors and specimen drift because the sampling density of the images tends to be lower (to achieve an acceptable signal/noise ratio).…”

Section: Discussionmentioning

confidence: 99%

Structural characterization of TiN/NbN multilayers: X‐ray diffraction, energy‐filtered TEM and Fresnel contrast techniques compared

Lloyd

Molina-Aldareguia

Clegg

2005

Journal of Microscopy

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SummaryTwo TiN/NbN multilayers with wavelength 13.6 and 6.15 nm have been characterized by X-ray diffraction (XRD), Fresnel contrast analysis (FCA) and energy-filtered transmission electron microscopy (EFTEM). Good agreement between the composition profile obtained by FCA and EFTEM is obtained if the lower resolution of the EFTEM images is taken into account. The relative advantages and disadvantages of the techniques are discussed. Used together the two TEM techniques provide a quantitative characterization that is consistent with, and for some parameters provides more precise values than, that from XRD. The analysis shows that the multilayers have narrow interfaces (< 1 nm) and a composition amplitude close to 95% for the longer wavelength.

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Section: Discussionmentioning

confidence: 99%

Structural characterization of TiN/NbN multilayers: X‐ray diffraction, energy‐filtered TEM and Fresnel contrast techniques compared

Lloyd

Molina-Aldareguia

Clegg

2005

Journal of Microscopy

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Fresnel fringe effects at interfaces of thin multilayer structures

Nguyen¹,

Gronsky²,

Kortright³

1990

Proc. annu. meet. Electron Microsc. Soc. Am.

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Recent developments in the TEM Fresnel-fringe technique have provided an alternative method to the determination of structures and morphology of interfaces in multilayer thin film structures. This method has been employed in the investigation of structures and defects in grain boundaries, dislocations, precipitate platelets, twin boundaries, metal interfaces, and multilayer structures. It has been demonstrated that the fringe spacing primarily relates to the layer thickness, while the fringe contrast as a function of defocus relates to the magnitude of the localized change in the scattering potential and thus to the interfacial composition. The profile of the fringes is more closely related to the abruptness of the composition change at the interface. Other factors affecting the Fresnel fringe intensity are the specimen thickness, aperture size, beam convergence, and degree of tilt of the interface from the incident electron beam.Fresnel fringes result from the electrons experiencing an abrupt change in the inner scattering potential parallel to the electron beam path. Most previous calculations of the Fresnel contrast with defocus have simulated models based on one square or symmetrical trapezoid-shaped potential well, which are applicable only to a single interface or grain boundary, or to a few layer pairs of the multilayer.

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HRTEM study of a Cu/Al₂O₃interface

Ernst

Pirouz

Heuer

1991

Philosophical Magazine A

107

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The determination of the structure and composition at interfaces to atomic resolution

Cited by 3 publications

References 21 publications

Structural characterization of TiN/NbN multilayers: X‐ray diffraction, energy‐filtered TEM and Fresnel contrast techniques compared

Structural characterization of TiN/NbN multilayers: X‐ray diffraction, energy‐filtered TEM and Fresnel contrast techniques compared

Fresnel fringe effects at interfaces of thin multilayer structures

HRTEM study of a Cu/Al₂O₃interface

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The determination of the structure and composition at interfaces to atomic resolution

Cited by 3 publications

References 21 publications

Structural characterization of TiN/NbN multilayers: X‐ray diffraction, energy‐filtered TEM and Fresnel contrast techniques compared

Structural characterization of TiN/NbN multilayers: X‐ray diffraction, energy‐filtered TEM and Fresnel contrast techniques compared

Fresnel fringe effects at interfaces of thin multilayer structures

HRTEM study of a Cu/Al2O3interface

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HRTEM study of a Cu/Al₂O₃interface