The development of A 3‐dimensional vibration measuring system with corner cubes and quadrant detectors(Invited)

Abstract

2010) The development of A 3-dimensional vibration measuring system with corner cubes and quadrant detectors (Invited) , Journal of the Chinese Institute of Engineers, 33:1, 71-80, ABSTRACTIn this paper, a new optical 3-dimensional vibrometer is presented. This system is composed of two orthogonally set up corner cubes (CC), a collimated laser source, two quadrant detectors (QD) and three beam-splitters (BS). The corner cubes are designed to be fixed to the vibrating object and reflect the laser source onto the quadrant detectors. Due to the optical characteristics of the corner cubes, the measuring results of the QD can be magnified twice and it is not affected by micrometer-angle. So, the three-dimensional vibration amplitude can be obtained. The resolution is about 50 nm. This system is characterized by three-dimensional measurement, high resolution, low cost, simple set up and wide bandwidth.

Development of a simple two-dimensional optical measurement system for linear guideways

“…The measurement system can measure 2D errors and its accuracy is 0.5 mm. Chen et al 9 presented a three-dimensional vibration measurement system with CCs and QDs; position errors can be obtained. The resolutions of the system are 100 nm and 1000 Hz.…”