The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

Shi, Yunbo; Yang, Zan; Ma, Zhanfang; Cao, Huiliang; Kou, Zhiwei; Zhi, Dan; Chen, Yanxiang; Feng, Hengzhen; Liu, Jun

doi:10.3390/s16060840

Cited by 10 publications

(7 citation statements)

References 15 publications

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“…The original signal collected in this paper was from a newly designed and manufactured high-G MEMS accelerometer (HGMA) [ 26 , 27 ]. It is a kind of accelerometer with high impact survival rate and high range.…”

Section: High-g Mems Accelerometermentioning

confidence: 99%

High-G Calibration Denoising Method for High-G MEMS Accelerometer Based on EMD and Wavelet Threshold

Pang²,

Huang

et al. 2019

Micromachines

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High-G MEMS accelerometers have been widely used in monitoring natural disasters and other fields. In order to improve the performance of High-G MEMS accelerometers, a denoising method based on the combination of empirical mode decomposition (EMD) and wavelet threshold is proposed. Firstly, EMD decomposition is performed on the output of the main accelerometer to obtain the intrinsic mode function (IMF). Then, the continuous mean square error rule is used to find energy cut-off point, and then the corresponding high frequency IMF component is denoised by wavelet threshold. Finally, the processed high-frequency IMF component is superposed with the low-frequency IMF component, and the reconstructed signal is denoised signal. Experimental results show that this method integrates the advantages of EMD and wavelet threshold and can retain useful signals to the maximum extent. The impact peak and vibration characteristics are 0.003% and 0.135% of the original signal, respectively, and it reduces the noise of the original signal by 96%.

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Section: High-g Mems Accelerometermentioning

confidence: 99%

High-G Calibration Denoising Method for High-G MEMS Accelerometer Based on EMD and Wavelet Threshold

Pang²,

Huang

et al. 2019

Micromachines

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“…The original signal collected in this paper is from a newly designed and manufactured high-G MEMS accelerometer (HGMA) [26,27]. It has a high impact survival rate and high measuring range.…”

Section: Work Mode Analysismentioning

confidence: 99%

Temperature Drift Compensation for High-G MEMS Accelerometer Based on RBF NN Improved Method

Zhu

Pang²,

Zhang

et al. 2019

Applied Sciences

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In this paper, the method for compensating the temperature drift of high-G MEMS accelerometer (HGMA) is proposed, including radial basis function neural network (RBF NN), RBF NN based on genetic algorithm (GA), RBF NN based on GA with Kalman filter (KF), and the RBF NN + GA + KF method compensated by the temperature drift model. First, this paper introduces an HGMA structure working principle, conducts a finite element analysis, and produces the results. The simulation results show that the HGMA working mode is the 1st order mode, and its resonant frequency is 408 kHz. The 2nd order mode resonant frequency is 667 kHz, and the gap with the first mode is 260 kHz, indicating that the coupling movement between the two modes is tiny, so the HGMA has good linearity. Then, a temperature experiment is performed to obtain the output value of HGMA. The output values of HGMA are analyzed and optimized by using the algorithms proposed in this paper. The processing results show that the RBF NN + GA + KF method compensated by the temperature drift model achieves the best denoing consequent. The processing results show that the temperature drift of the HGMA is effectively compensated. The final results show that acceleration random walking improved from 17130 g/h/Hz0.5 to 765.3 g/h/Hz0.5, and bias stability improved from 4720 g/h to 57.27 g/h, respectively. The results show that after using the RBF NN + GA + KF method, combined with the temperature drift model, the temperature drift trend and noise characteristics of HGMA are well optimized.

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“…e original signal collected in this paper comes from a newly designed and manufactured High-G MEMS accelerometer [23]. Its structure is in the form of four-beam islands.…”

Section: Structure and Structural Parameters Of The High-g Mems Accelmentioning

confidence: 99%

Fusion Algorithm‐Based Temperature Compensation Method for High‐G MEMS Accelerometer

Shen

Cao

et al. 2019

Shock and Vibration

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In recent years, High-G MEMS accelerometers have been widely used in aviation, medicine, and other fields. So it is extremely important to improve the accuracy and performance of High-G MEMS accelerometers. For this purpose, we propose a fusion algorithm that combines EMD, wavelet thresholding, and temperature compensation to process measurement data from a High-G MEMS accelerometer. In the fusion algorithm, the original accelerometer signal is first decomposed by EMD to obtain the intrinsic mode function (IMF). Then, sample entropy (SE) is used to divide the IMF components into three segments. The noise segment is directly omitted, wavelet thresholding is performed on the mixing segment, and a GA-BP performs temperature compensation on the drift segment. Finally, signal reconstruction is implemented. Later, a comparative analysis is carried out on the results from four models: EMD, wavelet thresholding, EMD + wavelet thresholding, and EMD + wavelet thresholding + temperature compensation. The experimental data show that the acceleration random walk change from 1712.66 g/h/Hz0.5 to 79.15 g/h/Hz0.5 and the zero-deviation stability change from 49275 g/h to 774.7 g/h. This indicates that the fusion algorithm (EMD + wavelet thresholding + temperature compensation) not only effectively suppresses the noise of high-frequency components but also compensates for temperature drift in the accelerometer.

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The Development of a Dual-Warhead Impact System for Dynamic Linearity Measurement of a High-g Micro-Electro-Mechanical-Systems (MEMS) Accelerometer

Cited by 10 publications

References 15 publications

High-G Calibration Denoising Method for High-G MEMS Accelerometer Based on EMD and Wavelet Threshold

High-G Calibration Denoising Method for High-G MEMS Accelerometer Based on EMD and Wavelet Threshold

Temperature Drift Compensation for High-G MEMS Accelerometer Based on RBF NN Improved Method

Fusion Algorithm‐Based Temperature Compensation Method for High‐G MEMS Accelerometer

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