The development of a prototype high-speed stylus profilometer and its application to rapid 3D surface measurement

Abstract

This paper describes some of the design aspects of a prototype high-speed stylus profilometer intended primarily for rapid 3D measurement of small surface areas.

Sensor characterization by comparative measurements using a multi-sensor measuring system

“…As presented, the results of the AFM can be used as reference data for the characterization of other sensors. For a theoretical and numerical analysis of the measurement results of optical sensors, the results of the AFM can be used as input data to a simulation program introduced in Xie (2017), which is based on Kirchhoff theory and the Richards-Wolf model (Richards and Wolf, 1959).…”

“…Appropriate procedures are presented by Sheppard and Choudhury (1977) as well as Corle and Kino (1996) for confocal microscopy using transmitted and reflected light. For the calculation of the intensities a simulation program introduced by Xie (2017) is used, which is based on the Richards-Wolf model (Richards and Wolf, 1959). Here, the measured AFM profile builds the input surface to rebuild the intensities I (n y y, n z z) with the lateral sampling interval y equal to 20 nm.…”

“…However, the tip may influence the sample to be measured and also limits the measuring speed typically up to 1 mm s −1 . Therefore, there are efforts to increase the measuring speed of tactile sensors and to reduce the wear of the stylus tip (Morrison, 1996;Doering et al, 2017). Doering et al (2017) present a microprobe which allows tactile roughness measurements with a lateral scanning speed of 15 mm s −1 .…”

Sensors for dynamic characterisation of magnetic storage systems

“…Depending on the measurand there is a vast array of sensors that can be used for surface and textural characterisation. One of the standard methods for investigating the surface profile is to use a profilometer [1]. A profilometer utilises a stylus much in the same way as a record player follows the variations along the track of a record, the main difference being that the profilometer uses optical sensing to determine the attitude of the stylus.…”

Получение профилей и контурных картин поверхностей вращения способом триангуляции с использованием зеркально отражeнного излучения, алгоритмы и расчетные формулы

“…Однако до настоящего времени они не смогли вытеснить традиционно применяемые в данной области контактные профилометры. Прогресс идёт в направлении развития комбинированных устройств, в которых в качестве первичного преобразователя используется контактный щуп, а для дальнейшего преобразования сигнала используют оптические методы [4][5][6]. Очевидно, это является компромиссным решением.…”