Abstract:We report the development of two epilayers namely the baseline highly strained channel and enhanced low gate leakage samples. The Hall data shows that the enhanced epilayer portraying higher sheet carrier concentration, but comparable carrier mobility in the 2-DEG layer, as compared to the baseline sample. The WinGreen simulation also conformed the enhanced epilayer advantages where wider Schottky barrier is observed and subsequently double carrier concentration is simulated in the channel. Both samples show l… Show more
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