The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

Wang, Ye; Fu, Xiuhua; Chen, Yongyi; Q, Li; Wang, Lijun

doi:10.3390/app12136503

Cited by 10 publications

(6 citation statements)

References 73 publications

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“…Wang et al deal with the surface relief gratings in their recent review . They presented both historical and state-of-the-art achievements in that field.…”

Section: Resultsmentioning

confidence: 99%

Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5–6 MeV Energy Range

Bányász,

Rajta,

Havránek

et al. 2024

ACS Omega

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A method for the fabrication of high diffraction efficiency optical transmission gratings with quasi-sinusoidal profile in glasses by microbeams of medium-mass ions of 5−6 MeV energy was devised and demonstrated. Gratings with a 30 μm grating constant have been manufactured and characterized by interference microscopy and microprofilometry. The obtained surface profiles of the gratings were found to be quasi-sinusoidal with up to 265 nm amplitude. Measured highest first-order diffraction efficiencies were around 26% in both Pyrex and IOG glasses. Such gratings could serve as coupling elements in integrated optics and photonic integrated circuits.

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“…Wang et al deal with the surface relief gratings in their recent review . They presented both historical and state-of-the-art achievements in that field.…”

Section: Resultsmentioning

confidence: 99%

Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5–6 MeV Energy Range

Bányász,

Rajta,

Havránek

et al. 2024

ACS Omega

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“…In the manufacture and use of gratings, there are many unstable factors that affect the diffraction efficiency. Manufacturing errors occur during the actual manufacturing process [24][25][26], affecting grating ridges and substrate. In addition to the tolerances of manufacture, during use, the nature of the incident wave also affects the diffraction efficiency.…”

Section: Discussion and Analysismentioning

confidence: 99%

High uniformity splitter with great inhibition of ±1st orders

Wang,

Liu

2023

Laser Phys.

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A transmissive double-groove grating under vertical incidence is proposed in this paper. The grating has a total of five diffraction orders, and the effect of a three-channel beam splitter is achieved by inhibiting the diffraction efficiency of ±1st orders. This is a polarization-independent micro-nano structure that achieves triple beam splitting under both TE and TM polarization. The diffraction efficiency of the 0th order and ±2nd orders for TE polarization orders can reach 32.55% and 32.72%, respectively. And the diffraction efficiency of 0th order and ±2nd orders for TM polarization can reach 32.28% and 32.59%, respectively. Both TE and TM polarization can achieve 99% uniformity. The grating performs well in terms of manufacturing tolerances and immunity to interference.

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“…Consequently, they have been applied to metalenses [70] , metaholograms [71] , and color printing [72] . However, the use of EBL and holographic lithography to realize large-area metasurfaces has led to high manufacturing costs and optical diffraction limit problems such as a proximity effect [73] . Kim et al proposed UV NIL as a one-step printable platform without secondary operations (e.g., etching and deposition), demonstrating the feasibility of NIL for the mass production of optical metamaterials [Fig.…”

Section: Soft Lithographymentioning

confidence: 99%

Emerging low-cost, large-scale photonic platforms with soft lithography and self-assembly

et al. 2023

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.Advancements in micro/nanofabrication have enabled the realization of practical micro/nanoscale photonic devices such as absorbers, solar cells, metalenses, and metaholograms. Although the performance of these photonic devices has been improved by enhancing the design flexibility of structural materials through advanced fabrication methods, achieving large-area and high-throughput fabrication of tiny structural materials remains a challenge. In this aspect, various technologies have been investigated for realizing the mass production of practical devices consisting of micro/nanostructural materials. This review describes the recent advancements in soft lithography, colloidal self-assembly, and block copolymer self-assembly, which are promising methods suitable for commercialization of photonic applications. In addition, we introduce low-cost and large-scale techniques realizing micro/nano devices with specific examples such as display technology and sensors. The inferences presented in this review are expected to function as a guide for promising methods of accelerating the mass production of various sub-wavelength-scale photonic devices.

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The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications

Cited by 10 publications

References 73 publications

Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5–6 MeV Energy Range

Fabrication of Quasi-Sinusoidal Surface Relief Optical Transmission Gratings in Pyrex and IOG Glasses by Implantation with Oxygen and Nitrogen Ion Microbeams of the 5–6 MeV Energy Range

High uniformity splitter with great inhibition of ±1st orders

Emerging low-cost, large-scale photonic platforms with soft lithography and self-assembly

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