“…In recent years, as the requirements of the high positioning accuracy increase in the semiconductor and precision manufacturing industry, high-precision positioning devices are necessary in the applications. Piezoelectric (PZT) actuator is based on the converse piezoelectric effect [1] of piezoceramic materials and has been popularly applied as actuator in precision positioning systems [2,3], microelectronic mechanical systems [4], micro-/nanomanufacturing systems [5,6], nanobioengineering [7], and flexible electronics manufacturing [8]. The advantages of PZT actuator are fast frequency response, high positioning precision, small size, high speed, high bandwidth, high electrical-mechanical transformation efficiency, and small thermal expansion.…”