1982
DOI: 10.1063/1.331666
|View full text |Cite
|
Sign up to set email alerts
|

The early history of the scanning electron microscope

Abstract: The article begins with an account of prewar German work, particularly that of von Ardenne, who established the theoretical basis of a scanning electron microscope and constructed an instrument which was primarily intended to overcome chromatic aberration when relatively thick specimens were examined by transmission. Neither this microscope nor a different one built a few years later in the U. S. A. attained sufficient resolution to gain acceptance and the reasons for this are examined. The remainder of the ar… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
46
0

Year Published

1996
1996
2016
2016

Publication Types

Select...
5
2
1

Relationship

0
8

Authors

Journals

citations
Cited by 98 publications
(46 citation statements)
references
References 16 publications
0
46
0
Order By: Relevance
“…The combined effect of secondary and field-emission is also possible through electron-stimulated field-emission [32,33], where electrons strike the tip of a nanoscale emitter under a strong applied field, leading to highly enhanced emission of further electrons. An applied electric field can also affect the emission and trajectories of secondary electrons emitted from a cathode, enabling voltage-contrast imaging in electron microscopy [34][35][36]. Finally, it is only natural to expect that more than two stimuli can also be employed, as in combining several of field, light, heat, and primary energetic particles all at once, to induce electron emission.…”
Section: Sourcementioning
confidence: 99%
“…The combined effect of secondary and field-emission is also possible through electron-stimulated field-emission [32,33], where electrons strike the tip of a nanoscale emitter under a strong applied field, leading to highly enhanced emission of further electrons. An applied electric field can also affect the emission and trajectories of secondary electrons emitted from a cathode, enabling voltage-contrast imaging in electron microscopy [34][35][36]. Finally, it is only natural to expect that more than two stimuli can also be employed, as in combining several of field, light, heat, and primary energetic particles all at once, to induce electron emission.…”
Section: Sourcementioning
confidence: 99%
“…The different types of electron scattering (backscattered, secondary, and Auger electrons) are the basis of most electron microscopy methods [12]. The widespread use of SEM became possible after 1958, when researchers from Cambridge (UK) built the first commercial prototype [13]. The typical primary electron beam used in a SEM is of 1-30 kV, with a beam current of 1 pA to 20 nA that can be focused in about 2-100-nm spot size, depending on the emitter source [14,15].…”
Section: Scanning Electron Microscopy (Sem)mentioning
confidence: 99%
“…He later wrote a number of accounts of the development of the instrument [1,5], in which the work of his predecessors was, characteristically, praised above his own: "Von Ardenne was the true father of the scanning …”
mentioning
confidence: 99%
“…In his own words, "The design and construction work would provide an excellent training in research; we should learn a great deal about the practical side of electron optics, which would be useful in other projects; and we should certainly end up with a microscope which gave results of some kind, which might or might not justify further work. I decided to go ahead" [1]. A succession of research students, the first of whom -Dennis McMullan -has written about Sir Charles for Nature [2], advanced the project to the point at which the Stereoscan reached the market.…”
mentioning
confidence: 99%
See 1 more Smart Citation