2023
DOI: 10.1088/1361-6641/acd6b2
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The effect of Ag doping on the structure, optical, and electronic properties of ZnO nanostructures deposited by atmospheric pressure MOCVD on Ag/Si substrates

Abstract: Atmospheric pressure metal-organic chemical vapor deposition was used to synthesize Ag-containing ZnO nanostructures of different morphology on Si substrates coated by Ag. Ag from Ag/Si substrates and Ag from silver acetylacetonate after its decomposition were used as a catalyst for ZnO nanocrystal growth for deposition of ZnO nanostructures with different morphologies. We investigated the relation of the structural parameters and chemical composition probed by X-ray diffraction (XRD), X-ray photoelectron spec… Show more

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Cited by 4 publications
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“…Metal acetylacetonates belong to the β-diketonate family and are considered classic precursors for metal-organic chemical vapor deposition (MOCVD) applied to obtain highquality film materials [1][2][3][4][5][6]. Admittedly, the success of film preparation, especially thin and multicomponent ones, is crucially dependent on the thermal properties of the precursors used, which have to provide the essential level of metal-containing vapors fed to the deposition zone, thereby causing the formation of a coating of the desired microstructure, thickness, and composition.…”
Section: Introductionmentioning
confidence: 99%
“…Metal acetylacetonates belong to the β-diketonate family and are considered classic precursors for metal-organic chemical vapor deposition (MOCVD) applied to obtain highquality film materials [1][2][3][4][5][6]. Admittedly, the success of film preparation, especially thin and multicomponent ones, is crucially dependent on the thermal properties of the precursors used, which have to provide the essential level of metal-containing vapors fed to the deposition zone, thereby causing the formation of a coating of the desired microstructure, thickness, and composition.…”
Section: Introductionmentioning
confidence: 99%