Herein, the phase, composition, morphologies, particle size distribution, and specific surface area of Mn oxide fumes generated after the vacuum treatment of melting Mn steels with different initial Mn contents are characterized. The thermodynamic calculation results reveal that for a given temperature and pressure, Mn vapor generation increases with increasing initial Mn content in steel. Moreover, the experimental results find that the amount of the Mn oxide fumes on the vacuum chamber after vacuum processing gradually increases with increasing initial Mn content in the melt. The fumes on the crucible generated after vacuum processing are composed of mainly coral‐shaped Mn3O4 with the size of 500 nm and a small amount of spherical‐like Mn2O3 with the sizes of 50–200 nm. Meanwhile, the fumes deposited on the furnace chamber contain Mn nanoparticles with the sizes of less than 50 nm, MnO nanorods with the sizes of 50–200 nm, and Mn3O4 nanoparticles with the sizes of 50–500 nm. In addition, the main phase of the fumes deposited on the vacuum chamber gradually changes to elemental Mn with an increase in the initial Mn content. The temperature and particle size are responsible for thermodynamic stability of Mn oxides at the nanoscale.