The effect of coil design on materials synthesis in an inductively coupled plasma torch

Abstract

A mathematical model for the analysis and design of inductively coupled plasma torches is presented. The model is based upon a solution of the electromagnetic vector potential equation and is capable of predicting the two-dimensional velocity, temperature, and electromagnetic fields as well as the reaction kinetics inside the torch for any axisymmetric coil configuration. The model is used to study the effect of coil design on the thermal decomposition of silicon tetrachloride to silicon. The coil design is found to affect both the temperature field and the flow field and to have a significant effect on the reaction kinetics in the torch. It is demonstrated that through fundamental changes in the coil design it is possible to control the location of the reaction zone and to reduce silicon deposition on the wall of the reactor.

Three-dimensional modeling of inductively coupled plasma torches

“…In Fig. 10, a planar coil configuration is taken into account, as suggested in [19], in order to improve the fluid dynamic characteristics of the plasma gas for the optimization of the chemical processes inside the torch, avoiding material deposition on the tube wall. Finally, Fig.…”

Modeling of non-equilibrium argon–oxygen induction plasmas under atmospheric pressure

“…Some modeling works of induction thermal plasmas including chemical reaction kinetics have been proposed: reactions between SiCl 4 and H 2 [5], dissociation of SiCl 4 [6,7], dissociation and recombination of finite-rate of diatomic gas in argon plasmas [2,[8][9][10][11][12], ionization and recombination as well as dissociation of N 2 in argon plasmas [13,14], synthesis of ultra-fine powders through the decomposition of SiCl 4 [15], ionization of seeded alkali metals [16]. In these works, estimation of thermodynamic and transport properties was oversimplified, therefore, more sophisticated models are required.…”

Three dimensional modelling of inductively coupled plasma torches: comparison with experiments and applications

“…10, a planar coil configuration with dimensions and working conditions as in Tab. 6 is taken into account, as suggested in [21], with the aim of inducing fluid dynamic conditions in the plasma which permit to avoid material deposition on the tube wall and therefore to optimize the chemical processes inside the torch. Finally, Fig.…”