The Effect of Design and Process Parameters on Electromechanical Coupling for a Thin-Film PZT Membrane

Al-Hattamleh, Omar; Cho, Jeong; Richards, R. F.; Bahr, David F.; Richards, C. D.

doi:10.1109/jmems.2006.883575

Cited by 7 publications

(7 citation statements)

References 45 publications

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“…The intercept of this line is 4ζ, and the slope of the diagram is 8E/3(1-ν). The measured average stress was around 100 MPa, which is in accordance with previous reports[19,182,183].Figure 3-14shows results of stress measurements for a diaphragm with a=600 μm.…”

supporting

confidence: 88%

“…These values in turn depends on the process parameters such as heat treatments [186], the ratio of Zr to Ti [155], growth interface chemistry [187], and deposition technique of the bottom electrode [188]. In addition to these materials properties, the characteristics of the composite structure such as residual stress, side length, aspect ratio, electrode coverage, layer thicknesses, and boundary conditions will also have an impact on electromechanical coupling [183,189,190].…”

Section: Calculation Of Electromechanical Coupling Coefficientmentioning

confidence: 99%

“…In multilayered piezoelectric microdiaphragm, during the fabrication processes high residual stresses generated in the diaphragm [183]. The contribution of these stresses in resonance frequency usually is much higher than the stiffness term, especially in the first fundamental mode [19,193].…”

Section: Pressure Sensitivitymentioning

confidence: 99%

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A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing

Olfatnia¹

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In recent years, development of new types of sensors based on microelectromechanical systems (MEMS) technology has found great popularity among researchers. These sensors have found extensive functionality in broad aspects of sensing; including thermal, tactile, chemical, and biological. Microcantilevers as the icon of MEMS sensors with advantages such as high sensitivity, label-free detection, robust structure and high reproducibility have benefited diverse fields of research since their inception. Recently, piezoelectric based microdiaphragms have been proposed with high sensitivity, low power consumption, and compact size in response of some drawbacks of microcantilevers, including their fragile structure, and their low quality factor in liquid. This thesis reports theoretical and experimental study of piezoelectric microdiaphragm platform for physical and biological sensing. The microdiaphragms were first designed and then fabricated by MEMS fabrication processes. Their different characteristics such as frequency behavior, mode shapes, coupling factor, quality factor (Q-factor), nonlinear vibrations, mass sensitivity, and pressure sensitivity were studied theoretically and experimentally. Finally, they have been applied for two different schemes of sensing; mass sensing and pressure sensing. These experimental results demonstrate promising perspective of piezoelectric microdiaphragms as physical and chemical sensors. Significant amount of residual stresses, which were generated in the microdiaphragm during the fabrication process, were characterized first. It was concluded that both flexural rigidity and tension contribute to the resonant frequency of the microdiaphragm. When the tension parameter k is less than 2, the resonant frequency almost remain constant with respect to k. However, when

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supporting

confidence: 88%

Section: Calculation Of Electromechanical Coupling Coefficientmentioning

confidence: 99%

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A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing

Olfatnia¹

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“…By releasing the substrate beneath the thin film PZT, the mechanical constraints near the bottom interface of the PZT are reduced and the piezoelectric domain walls can more freely respond to the electric field and contribute more to the dielectric and piezoelectric properties, leading to better performance of the PMUTs [ 36 , 72 ]. Partially unclamping diaphragm edges [ 32 , 60 , 73 ], optimizing electrode configurations [ 55 , 74 , 75 ] and even adding DC bias [ 33 , 76 , 77 ] have also been used to increase the coupling coefficients and acoustic output of PMUTs.…”

Section: Piezoelectric Materials For Pmutsmentioning

confidence: 99%

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Qiu

Gigliotti

Wallace

et al. 2015

Sensors

297

198

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Many applications of ultrasound for sensing, actuation and imaging require miniaturized and low power transducers and transducer arrays integrated with electronic systems. Piezoelectric micromachined ultrasound transducers (PMUTs), diaphragm-like thin film flexural transducers typically formed on silicon substrates, are a potential solution for integrated transducer arrays. This paper presents an overview of the current development status of PMUTs and a discussion of their suitability for miniaturized and integrated devices. The thin film piezoelectric materials required to functionalize these devices are discussed, followed by the microfabrication techniques used to create PMUT elements and the constraints the fabrication imposes on device design. Approaches for electrical interconnection and integration with on-chip electronics are discussed. Electrical and acoustic measurements from fabricated PMUT arrays with up to 320 diaphragm elements are presented. The PMUTs are shown to be broadband devices with an operating frequency which is tunable by tailoring the lateral dimensions of the flexural membrane or the thicknesses of the constituent layers. Finally, the outlook for future development of PMUT technology and the potential applications made feasible by integrated PMUT devices are discussed.

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“…In this analysis the PZT was modeled imposing clamped external edges, an underlying layer 400 nm thick of SiO 2 and the 15 μm thick sealing polymeric layer. An elastic modulus of 77 GPa, a Poisson's ratio of 0.17 and a density of 2,200 kg/m 3 were utilized for the SiO 2 [34]. An elastic modulus of 3.2 GPa, a Poisson's ratio of 0.45 and a density of 1,100 kg/m 3 were used for the MX5000 TM layer [35].…”

Section: Transducer Characterizationmentioning

confidence: 99%

Medical Applications of Piezoelectric Microelectromechanical Systems

Griggio

Kim

Ural

et al. 2013

Integrated Ferroelectrics

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Bulk piezoelectric ceramics and single crystals are widely used in medical applications, including medical ultrasonic imaging, therapeutic ultrasound, and drug delivery. This paper reviews possibilities for thin film micromachined components as alternatives to the bulk devices. Particular emphasis is placed on the development of a CMOScompatible ultrasound system. For this purpose, a piezoelectric ultrasound system on a Si substrate was fabricated using a diaphragm geometry transducer with PZT films. A 1-D array of 8 elements was designed and fabricated using 4 photolithography steps. Cavities under the resonating elements were obtained by XeF 2 etching from the top-side of the wafer. Capacitance and admittance spectra showed a resonance at ∼ 42 MHz for the fabricated structures with a quality factor of 2.1, this resonance was higher than the one predicted by the natural frequency equation for circular plate. Catch-and pitch-mode tests were performed in water. Sensing and actuating functionalities were demonstrated for the fabricated devices, with collected signals of 40 mV peak-to-peak at a distance of 7.2 mm during the catch-mode test and amplitudes as high as 15 mV peak-to-peak at a distance of 7.4 mm during the pitch-mode test. A bandwidth of 83% was calculated during pitch-mode test.

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The Effect of Design and Process Parameters on Electromechanical Coupling for a Thin-Film PZT Membrane

Cited by 7 publications

References 45 publications

A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing

A theoretical and experimental study of piezoelectric microdiaphragm platforms for physical and biological sensing

Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging

Medical Applications of Piezoelectric Microelectromechanical Systems

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