19th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) 2013
DOI: 10.1109/therminic.2013.6675238
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The effect of heat treatment on spin-on oxide glasses in solar cell application

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Cited by 4 publications
(2 citation statements)
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“…SOG consists of a polysilicate polymer, ethanol (C 2 H 6 O), 2-propanol (C 3 H 8 O), acetone (CH 3 COCH 3 ), and water (H 2 O). Heat treatment of SOG at high temperatures removes impurities and solvents, insulating it like SiO 2 based on the Si-O structure [ 36 ]. SOD comprises ethanol (C 2 H 6 O), water (H 2 O), and phosphorus silicate polymer, with a 15% internal phosphorus mass ratio.…”
Section: Methodsmentioning
confidence: 99%
“…SOG consists of a polysilicate polymer, ethanol (C 2 H 6 O), 2-propanol (C 3 H 8 O), acetone (CH 3 COCH 3 ), and water (H 2 O). Heat treatment of SOG at high temperatures removes impurities and solvents, insulating it like SiO 2 based on the Si-O structure [ 36 ]. SOD comprises ethanol (C 2 H 6 O), water (H 2 O), and phosphorus silicate polymer, with a 15% internal phosphorus mass ratio.…”
Section: Methodsmentioning
confidence: 99%
“…Depending on the heat-treatment conditions, such as the temperature, time, and ambient gas, impurities and solvents were removed from the interior of the SOG. SOG treated at high temperatures for an adequate duration exhibited excellent insulation properties akin to SiO 2 , thereby enhancing its electrical stability [36]. SOD comprised components of a phosphorus silicate polymer with a phosphorus mass ratio of 15% of the total mass ratio of SOD.…”
Section: Synthesis Of Psg and Sog Filmsmentioning
confidence: 99%