“…The project emphasizes solving technical problems such as MEMS sensor design, fabrication, reliability, signal treatment, and system integration. In this project, we have improved the application and production of MEMS sensors for acceleration, pressure, liquid, dip angle, LNG, and LPG [15,16]. In addition, the research terms have developed a number of MEMS gas sensors such as for chlorine, aviation kerosene, gasoline, alkynes, alkenes, hydrocarbon, ammonia, ketene, alcohol, benzene, and glacial acetic acid.…”