1996
DOI: 10.1016/0168-9002(96)00194-5
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The effect of metal field plates on multiguard structures with floating p+ guard rings

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Cited by 27 publications
(10 citation statements)
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“…A small metal overlap directed toward the scribe line reduces the electric field at the implant edge. A larger overlap toward the device centre increases the voltage drop between rings [22,23].…”
Section: Mask Layoutmentioning
confidence: 99%
“…A small metal overlap directed toward the scribe line reduces the electric field at the implant edge. A larger overlap toward the device centre increases the voltage drop between rings [22,23].…”
Section: Mask Layoutmentioning
confidence: 99%
“…Охранные кольца формировались диффузией бора с последующей разгонкой. Наличие поверхностного заряда приводит к увеличению концентрации примеси в приповерхностном слое, из-за чего ширина обеднённой области (ОПЗ) вблизи поверхности отличается от ширины ОПЗ в объёме эпитаксиального слоя [2]. Напряженность поля увеличивается с увеличением концентрации примеси в приповерхностном слое.…”
unclassified
“…Multi-guard ring structures allow high bias voltages to be applied without causing excessive dark currents or premature detector breakdown (Evensen et al 1993;Avset & Evensen 1996;Da Rold et al 1997) . Figure 3 shows schematics of such devices.…”
Section: Detector Technologiesmentioning
confidence: 99%