2013
DOI: 10.1016/j.apsusc.2012.10.162
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The effect of neutron irradiation on the properties of SiC and SiC(N) layer prepared by plasma enhanced chemical vapor deposition

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Cited by 12 publications
(6 citation statements)
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“…The wide (940 cm -1 to 990 cm -1 ) peak can be related to the second-order transversal optical phonons as observed in bulk crystalline silicon. 34 SiC crystallites also show a wide peak at this wavenumber 35 , but in that case, a first order peak would also have been present at 790 cm -1 This conflicts with the finding in Figure 5b, because carbon in form of alloys or allotropes must be present in the specimen. To resolve this, we examine the TEM diffraction patterns in Figures 2 and 4, where they were not indexed for legibility.…”
Section: Please Do Not Adjust Marginsmentioning
confidence: 58%
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“…The wide (940 cm -1 to 990 cm -1 ) peak can be related to the second-order transversal optical phonons as observed in bulk crystalline silicon. 34 SiC crystallites also show a wide peak at this wavenumber 35 , but in that case, a first order peak would also have been present at 790 cm -1 This conflicts with the finding in Figure 5b, because carbon in form of alloys or allotropes must be present in the specimen. To resolve this, we examine the TEM diffraction patterns in Figures 2 and 4, where they were not indexed for legibility.…”
Section: Please Do Not Adjust Marginsmentioning
confidence: 58%
“…The wide (940 cm −1 to 990 cm −1 ) peak can be related to the second-order transversal optical phonons as observed in bulk crystalline silicon. 34 SiC crystallites also show a wide peak at this wavenumber, 35 but in this case, a first order peak would have also been present at 790 cm −1 . This conflicts with the finding in Fig.…”
Section: Current and Temperature Effectsmentioning
confidence: 89%
“…For the S 0 sample, the absorption peak at 530 cm −1 is attributed to the lattice vibration of partially carbonized Si atoms, while the peak at 580 cm −1 is due to the Si-O bond bending vibration of SiC hydrolysis or surface defect positions. [33][34] Furthermore, these peaks at 530 and 580 cm −1 can also be attributed to the Fe-O bond and the carboxyl symmetric/asymmetric stretching vibration signal in Fe-MOF. 35 Therefore, the peaks of S 1 sample at 530 and 580 cm −1 are more intense than that of S 0 due to the introduction of MIL-101(Fe).…”
Section: Resultsmentioning
confidence: 94%
“…In this study, FTIR and XPS assays of the film (a) showed that the nitrogen containing SiC film was formed on the substrate surface when Ar + ions were injected in conjunction with HMDS. In previous papers, it was shown that nitrogen containing SiC films were available for thin overcoats for flexible media [ 40 ], materials with low dielectric constant [ 41 ], and materials of passivation layer [ 42 ].…”
Section: Discussionmentioning
confidence: 99%