Cathode sputtering is a well-established technique for preparation of metal nanostructures. However, the substrate properties are very important in this process. On glass substrates, there is a difficulty with poor adhesion of the metal layers, but thanks to this, metal nanostructures can be produced using solid state dewetting process. Thin metal films on polymer substrates are strongly influenced by the surface properties of the polymers, which originate in the method of their preparation. A recent focus is direct sputtering of metal nanoparticles (NPs) into liquid substrates and their characterizations and applications. Polyethylene glycol (PEG) is one of the most commonly used liquid, which provides "stealth" character to nanostructures. Recent results in this area are reviewed in this chapter. PEGylated NPs could find application in drug delivery systems, therapy, imaging, biosensing, and tissue regeneration.