The Effect of Rotating Cylindrical Langmuir Probes in Magnetron Plasmas

Thompson, Shane; Bradley, James W.

doi:10.1002/1521-3986(200109)41:5<481::aid-ctpp481>3.0.co;2-c

Cited by 3 publications

(1 citation statement)

References 15 publications

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“…The high temperature plasma strongly magnetized requires even more attention on designing and using probes for measuring plasma parameters due to large fluxes of the high energy particles interacting with the probe surface and large heating load [3]. Rather recently, interesting result was reported on using cylindrical probes for measuring plasma parameters in magnetron discharge where probes may have various and combined orientations with respect to magnetic field lines [4].…”

Section: Introductionmentioning

confidence: 99%

On Electrical Probes Used in Magnetized Plasma Diagnostics

Mihăilă

Solomon

Costin

et al. 2013

Contrib. Plasma Phys.

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In some experimental conditions the electron saturation current of a cylindrical probe placed in a magnetized plasma and oriented along the magnetic field lines shows a large increase when the probe is positively biased with respect to plasma potential. The increase might double the electron saturation current which is followed by a negative slope of the current-voltage characteristic when the positive bias of the probe is further increased. This particular behavior was investigated versus probe length (0 − 5 mm) and radius, probe orientation with respect to the magnetic field lines, magnetic field strength (up to 0.42 T), gas nature and pressure, respectively. The increase of both electron current intensity and negative slope are well pronounced starting with a certain length of the probe and strongly dependent on probe orientation along the magnetic field lines. These particularities are also more pronounced with increasing of both magnetic field strength and mass of the gas atoms. Strong oscillations of the probe current are present in the negative slope region of the probe characteristic.Moreover, the light intensity emitted by plasma volume, where the probe is located, is also dependent on the probe bias. It shows a clear sharp maximum around plasma potential. A qualitative explanation of the probe characteristics with a negative slope obtained with the cylindrical probe is proposed.

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Section: Introductionmentioning

confidence: 99%

On Electrical Probes Used in Magnetized Plasma Diagnostics

Mihăilă

Solomon

Costin

et al. 2013

Contrib. Plasma Phys.

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The origin of Bohm diffusion, investigated by a comparison of different modelling methods

Bultinck¹,

Mahieu²,

Depla³

et al. 2010

J. Phys. D: Appl. Phys.

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‘Bohm diffusion’ causes the electrons to diffuse perpendicularly to the magnetic field lines. However, its origin is not yet completely understood: low and high frequency electric field fluctuations are both named to cause Bohm diffusion. The importance of including this process in a Monte Carlo (MC) model is demonstrated by comparing calculated ionization rates with particle-in-cell/Monte Carlo collisions (PIC/MCC) simulations. A good agreement is found with a Bohm diffusion parameter of 0.05, which corresponds well to experiments. Since the PIC/MCC method accounts for fast electric field fluctuations, we conclude that Bohm diffusion is caused by fast electric field phenomena.

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The diagnosis of plasmas used in the processing of textiles and other materials

Bradley

Bryant

2007

Plasma Technologies for Textiles

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The Effect of Rotating Cylindrical Langmuir Probes in Magnetron Plasmas

Cited by 3 publications

References 15 publications

On Electrical Probes Used in Magnetized Plasma Diagnostics

On Electrical Probes Used in Magnetized Plasma Diagnostics

The origin of Bohm diffusion, investigated by a comparison of different modelling methods

The diagnosis of plasmas used in the processing of textiles and other materials

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