The Effect of the Anisotropy of Single Crystal Silicon on the Frequency Split of Vibrating Ring Gyroscopes

Qin, Zhongyuan; Gao, Yimin; Jia, Jia; Ding, Xu Chu; Huang, Libin; Li, Hongsheng

doi:10.3390/mi10020126

Cited by 22 publications

(18 citation statements)

References 27 publications

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“…The fabrication process is shown in Figure 2. A more detailed description of the fabrication process can be found in our previous article [18]. For the rate mode of the DRG, one of the two orthogonal modes is driven into a stable resonant state, so it is usually called the driving mode.…”

Section: Basic Structure Of Drgmentioning

confidence: 99%

“…Due to manufacturing defects, it is difficult to perfectly match the resonance frequencies of the two modes, which results in a frequency split. The frequency split degrades the energy conversion efficiency of Coriolis force, which further results in degraded sensitivity, resolution, signal-to-noise ratio (SNR), and poor bias stability [18].…”

Section: Introductionmentioning

confidence: 99%

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Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

et al. 2020

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An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required to be designed, which simplifies the structure design. By using the quadratic relationship between the driving voltage and the electrostatic force, the virtual Coriolis force is obtained by applying an AC voltage whose frequency is half of the driving mode resonant frequency to the sense electrode. The phase difference between the virtual Coriolis force and the sense output signal is used for mode-matching. The structural characteristics and electrode distribution of the DRG are briefly introduced. Moreover, the mode-matching theories of the DRG are studied in detail. The scheme of the mode-matching control system is proposed. Simultaneously, the feasibility and effectiveness of the mode-matching method are verified by system simulation. The experimental results show that under the control of mode-matching at room temperature, the bias instability is reduced from 30.7575 • /h to 2.8331 • /h, and the Angle Random Walk (ARW) decreases from 1.0208 • / √ h to 0.0524 • / √ h. Compared with the mode mismatch condition, the ARW is improved by 19.48 times.Micromachines 2020, 11, 210 2 of 22 Therefore, the mode-matching technology improves the bias stability and mechanical sensitivity of MEMS gyroscopes by eliminating the frequency split between the driving mode and the sensing mode, which has attracted significant attention from researchers [19][20][21]. Furthermore, some frequency modification techniques are proposed. Laser finishing, ion beam milling, and selective deposition mass loading reduce frequency split [22,23]. However, these methods are often used to change the dynamic characteristics of the sensor permanently, and this type of tuning is inflexible and time-consuming. The tuning control is limited and can only be achieved offline.Electrostatic tuning is usually used for mode-matching, which can provide more flexibility and real-time realization [24][25][26][27][28][29]. The mode-matching process based on phase-locked loop (PLL) takes advantage of the phase delay of 90 • between the quadrature input and output of the sensing mode. This feature is used in [27] to achieve mode-matching and to adjust the tuning voltage using PLL technology. The amplitude-frequency characteristic refers to the maximum amplitude of the quadrature response signal during mode-matching [28]. However, in these methods, the signal from the Coriolis demodulation channel is used to control the frequency tuning voltage. Therefore, the angular velocity can only be measured if the tuning voltage is fixed, and the matching loop is disconnected after mode-matching. Thus, these methods cannot achieve real-time mode-matching. However, in practical applications, the frequency split of the vibratory mode changes with changes in environmental parameters [29]. Therefore, such one-time matching methods a...

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Section: Basic Structure Of Drgmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

et al. 2020

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“…

and

represent respectively the second moment of area of the ring cross-section and support beam cross-section. It is necessary to point out that the (111) silicon wafer was found to be in-plane isotropic in the literature [ 36 , 37 ].

and

are the radius of the ring structure and semicircular elastic support beam, respectively.…”

Section: Theoretical Analysismentioning

confidence: 99%

Micromachined Vibrating Ring Gyroscope Architecture with High-Linearity, Low Quadrature Error and Improved Mode Ordering

Gao

Jin

et al. 2020

Sensors

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A new micromachined vibrating ring gyroscope (VRG) architecture with low quadrature error and high-linearity is proposed, which successfully optimizes the working modes to first order resonance mode of the structure. The improved mode ordering can significantly reduce the vibration sensitivity of the device by adopting the hinge-frame mechanism. The frequency difference ratio is introduced to represent the optimization effect of modal characteristic. Furthermore, the influence of the structural parameters of hinge-frame mechanism on frequency difference ratio is clarified through analysis of related factors, which contributes to a more effective design of hinge-frame structure. The designed VRG architecture accomplishes the goal of high-linearity by using combination hinge and variable-area capacitance strategy, in contrast to the conventional approach via variable-separation drive/sense strategy. Finally, finite element method (FEM) simulations are carried out to investigate the stiffness, modal analysis, linearity, and decoupling characteristics of the design. The simulation results are sufficiently in agreement with theoretical calculations. Meanwhile, the hinge-frame mechanism can be widely applied in other existing ring gyroscopes, and the new design provides a path towards ultra-high performance for VRG.

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“…The design of the sensor was accomplished through a Matlab-lumped algorithm. Simulations were conducted neglecting some aspects that can stem from silicon anisotropy [26]. From a first-guess solution, the algorithm calculated the stiffness and the mass matrices by splitting the sensor into its fundamental components:…”

Section: Numerical Modeling Of the Structurementioning

confidence: 99%

Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope

Crescenzi

Castellito

Quaranta

et al. 2020

Sensors

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Gyroscopes are one of the next killer applications for the MEMS (Micro-Electro-Mechanical-Systems) sensors industry. Many mature applications have already been developed and produced in limited volumes for the automotive, consumer, industrial, medical, and military markets. Plenty of high-volume applications, over 100 million per year, have been calling for low-cost gyroscopes. Bulk silicon is a promising candidate for low-cost gyroscopes due to its large scale availability and maturity of its manufacturing industry. Nevertheless, it is not suitable for a real monolithic IC integration and requires a dedicated packaging. New designs are supposed to eliminate the need for magnets and metal case package, and allow for a real monolithic MEMS-IC (Integrated Circuit) electronic system. In addition, a drastic cost reduction could be achieved by utilizing off-the-shelf plastic packaging with lead frames for the final assembly. The present paper puts forward the design of a novel tri-axial gyroscope based on rotating comb-drives acting as both capacitive sensors and actuators. The comb-drives are comprised of a single monolithic moving component (rotor) and fixed parts (stators). The former is made out of different concentrated masses connected by curved silicon beams in order to decouple the motion signals. The sensor was devised to be fabricated through the PolyMUMPs® process and it is intended for working in air in order to semplify the MEMS-IC monolithic integration.

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The Effect of the Anisotropy of Single Crystal Silicon on the Frequency Split of Vibrating Ring Gyroscopes

Cited by 22 publications

References 27 publications

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

Automatic Mode-Matching Method for MEMS Disk Resonator Gyroscopes Based on Virtual Coriolis Force

Micromachined Vibrating Ring Gyroscope Architecture with High-Linearity, Low Quadrature Error and Improved Mode Ordering

Design of a Tri-Axial Surface Micromachined MEMS Vibrating Gyroscope

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