2019
DOI: 10.2478/auseme-2019-0003
|View full text |Cite
|
Sign up to set email alerts
|

The Effect of the Electrode Position on the Dynamic Behavior of an Electrostatically Actuated Microcantilever

Abstract: Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic micro-actuator has a direct impact on the amplitude of deflection throughout the cantilever. This research aims to study the effect of the electrode length and the applied voltage on the amplitude of deflection of the micro-cantilever. Also, the resonant frequency for the cantilever was computed for full length and compared with simulation results. Finite element method, ANSY… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2020
2020
2020
2020

Publication Types

Select...
2

Relationship

1
1

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 6 publications
0
2
0
Order By: Relevance
“…Step (4): Solving the resulted ODE system by MATLAB to obtain the solution of the Timoshenko beam dynamics.…”
Section: B Dynamics Solution Of Timoshenko Beammentioning
confidence: 99%
See 1 more Smart Citation
“…Step (4): Solving the resulted ODE system by MATLAB to obtain the solution of the Timoshenko beam dynamics.…”
Section: B Dynamics Solution Of Timoshenko Beammentioning
confidence: 99%
“…Flexible robotic manipulator systems are frequently used in a diversity of industrial fields such as moving strings, variable marine risers, and drill chains [1]- [4]. The Timoshenko beam is a type of flexible robotic manipulator which is an infinite dimensional system composed of one non-homogenous partial differential equation (PDE), one homogenous PDE, and three ordinary differential equations (ODEs).…”
Section: Introductionmentioning
confidence: 99%