The aim of this study was to investigate the effect of material type (artichoke leave, lemon peel, flaxseed meal), extraction temperature (50, 100, 120, 140, 160, 180, 200 °C) and static extraction time (5, 15, 30, 45 min) on 5-hydroxymethylfurfural (5-HMF) formation during subcritical water extraction. 5-HMF content of artichoke leave and lemon peel extracts increased 7.2 and 26.1 times with the rise of extraction temperature from 160 to 180 °C for 5 min during subcritical water extraction, respectively. Besides, 5-HMF content of artichoke leave, lemon peel and flaxseed meal extracts increased 1.4, 2.0 and 4.5 times as static extraction time increased from 15 to 45 min at 180 °C during subcritical water extraction, respectively. The highest 5-HMF content of artichoke leave and lemon peel extracts were obtained as 58.83 and 231.21 mg/L at 180 °C and 45 min, respectively. However, for flaxseed meal, the highest 5-HMF content (222.94 mg/L) was obtained at 200 °C and 15 min during subcritical water extraction.