“…Alteration of the structure and chemical composition of materials due to energetic ions or neutral particles is the most important concern in physical chemistry of surfaces/interfaces. The mechanism of ion-induced alteration of single and/or binary component oxides is well established. − ,− The Ti-bearing oxides have been particularly investigated in the past to investigate the effect of ions, such as helium, argon, and oxygen, and neutral particles since these materials exhibit various stoichiometric states and multiple valence states of Ti. − ,− Formation of reduced states, such as Ti 3+ , Ti 2+ , and even metallic Ti, on the surfaces of TiO 2 and other Ti-bearing simple oxides due to ion beam-induced alteration, depending on the conditions, of surface layers is well-known. − Chemical changes are usually attributed to the preferential sputtering. However, the mechanism of multicomponent oxide crystals in not well-developed and requires further attention.…”