Epitaxial Bi 2 Sr 2−x La x CuO 6+δ thin films were successfully deposited on tilted (001) SrTiO 3 substrates by in situ RF-magnetron sputtering. Good alignment of the film b-axis with the incommensurate modulation along [110] of SrTiO 3 and the film c-axis tilted 6 • toward [111] from the surface normal were confirmed by XRD, AFM and XTEM. From the in-plane resistivity measurements, the in-plane and out-of-plane resistivities ρ a and ρ c were deduced.