The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor

Chang, Jee-Gong; Kuo, Hung-Yi; Leu, Ing‐Chi; Hon, Min–Hsiung

doi:10.1016/s0925-4005(02)00034-5

Cited by 514 publications

(233 citation statements)

References 17 publications

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“…Among all the existing metal oxide gas sensors, ZnO based sensors are attracting wide attention when it is doped with Al due to the high sensitivity towards NO 2 and selectivity among other gases 9,15,18,23 . Also there are many fabrication techniques have been introduced in literature to synthesize Al doped ZnO sensors 15,16,19,20,2123,24 .…”

Section: Introductionmentioning

confidence: 99%

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Effect of RF power on the structural, optical and gas sensing properties of RF-sputtered Al doped ZnO thin films

Srinatha

Kamble³

et al. 2016

RSC Adv.

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The effect of Radio Frequency (RF) power on the properties of magnetron sputtered Al doped ZnO thin films and the related sensor properties are investigated. A series of 2 wt% Al doped ZnO; Zn0.98Al0.02O (AZO) thin films prepared with magnetron sputtering at different RF powers, are examined. The structural results reveal a good adhesive nature of thin films with quartz substrates as well as increasing thickness of the films with raising RF power. Besides, the increasing RF power is found to improve the crystallinity and grains growth as confirmed by X-ray diffraction. On the other hand, the optical transmittance is significantly influenced by the RF power, where the transparency values achieved are higher than 82% for all the AZO thin films and the estimated optical band gap energy is found to decrease with RF power due to an increase in the crystallite size as well as the film thickness. In addition, the defect induced luminescence at low temperature (77 K) and room temperature (300 K) was studied through photoluminescence spectroscopy, it is found that the defect density of electronic states of Al 3+ ion found to increase with increase of RF power due to the increase in the thickness of the film and the crystallite size. The gas sensing behavior of AZO films was studied for NO2 at 350 °C. The AZO film shows good response towards NO2 gas and also a good relationship between the response and the NO2 concentration, which is modeled using an empirical formula. The sensing mechanism of NO2 is discussed.

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Section: Introductionmentioning

confidence: 99%

“…Among all, r.f magnetron sputtering technique 15,19,24 has its own advantages to produce good quality of films having high surface area and surface roughness which are pre-requisite for the gas sensing. In addition, many parameters can be varied in order to obtain good quality of films with high reproducibility.…”

Section: Introductionmentioning

confidence: 99%

Effect of RF power on the structural, optical and gas sensing properties of RF-sputtered Al doped ZnO thin films

Srinatha

Kamble³

et al. 2016

RSC Adv.

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“…Such highly conductive metal oxides have been widely used in optoelectronic applications [32][33][34][35]. In the field of gas sensors, the application of conductive ZnO NRs is limited to chemical sensors [36][37][38][39], while currently there is no reported application in the field of GISs.…”

Section: Introductionmentioning

confidence: 99%

An enhanced gas ionization sensor from Y-doped vertically aligned conductive ZnO nanorods

Lee

Fang

Turner

et al. 2016

Sensors and Actuators B: Chemical

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A stable and highly sensitive gas ionization sensor (GIS) constructed from vertically aligned, conductive yttrium-doped ZnO nanorod (YZO NR) arrays is demonstrated. The conductive YZO NRs are synthesized using a facile one-pot hydrothermal method. At higher Y/Zn molar ratio, the aspect ratio of the YZO NRs is increased from 11 to 25. Doping with yttrium atoms decreases the electrical resistivity of ZnO NRs more than 100 fold. GIS measurements reveal a 6-fold enhancement in the sensitivity accompanied with a significant reduction in breakdown voltage from the highly conductive YZO NRs. Direct correlations between the resistivity of the NRs and GIS characteristics are established. 1 An Enhanced Gas Ionization Sensor from Y-doped Vertically Aligned Conductive ZnO Nanorods AbstractA stable and highly sensitive gas ionization sensor (GIS) constructed from vertically aligned, conductive yttrium-doped ZnO nanorod (YZO NR) arrays is demonstrated. The conductive YZO NRs are synthesized using a facile one-pot hydrothermal method. At higher Y/Zn molar ratio, the aspect ratio of the YZO NRs is increased from 11 to 25. Doping with yttrium atoms decreases the electrical resistivity of ZnO NRs more than 100 fold. GIS measurements reveal a 6-fold enhancement in the sensitivity accompanied with a significant reduction in breakdown voltage from the highly conductive YZO NRs. Direct correlations between the resistivity of the NRs and GIS characteristics are established.

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“…It is well known that the operating temperature has a significant effect on the gas-sensing performance of the sensor. Thus, in order to find the optimum operating This phenomenon can be explained from two aspects: (1) the kinetic of the reaction between the target gas and surface absorbed oxygen; (2) the kinetic of gas diffusion through the sensing layer [29,30]. When the sensor operated at a low temperature, the can be attributed to the fact that the obtained thermal energy was high enough to overcome the activation energy barrier for the surface reaction.…”

Section: Gas Sensor Fabrication and Measurementsmentioning

confidence: 99%

A fast response & recovery H2S gas sensor based on α-Fe2O3 nanoparticles with ppb level detection limit

Huang

Zhang

et al. 2015

Journal of Hazardous Materials

223

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The effects of thickness and operation temperature on ZnO:Al thin film CO gas sensor

Cited by 514 publications

References 17 publications

Effect of RF power on the structural, optical and gas sensing properties of RF-sputtered Al doped ZnO thin films

Effect of RF power on the structural, optical and gas sensing properties of RF-sputtered Al doped ZnO thin films

An enhanced gas ionization sensor from Y-doped vertically aligned conductive ZnO nanorods

A fast response & recovery H2S gas sensor based on α-Fe2O3 nanoparticles with ppb level detection limit

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