2000
DOI: 10.1016/s0957-4158(99)00066-5
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The electrolysis of water: an actuation principle for MEMS with a big opportunity

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Cited by 68 publications
(33 citation statements)
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“…To replenish the gas layer lost upon wetting, electrolysis was deemed better suited than other gas-generation methods such as thermal, pneumatic, and chemical on account of its low power consumption [20], the stability of the generated gases [21], its easy integration into a system, and its compatibility with water. In this study, we used a line pattern of thin-film gold on the bottom surface as the cathode (Fig.…”
Section: University Of California Los Angeles (Ucla) California 900mentioning
confidence: 99%
“…To replenish the gas layer lost upon wetting, electrolysis was deemed better suited than other gas-generation methods such as thermal, pneumatic, and chemical on account of its low power consumption [20], the stability of the generated gases [21], its easy integration into a system, and its compatibility with water. In this study, we used a line pattern of thin-film gold on the bottom surface as the cathode (Fig.…”
Section: University Of California Los Angeles (Ucla) California 900mentioning
confidence: 99%
“…Of course, this value is sensitive to temperature and pressure effects [11]. Thorough investigation of the exact cause of the increase in CO-tolerance due to negative pulses and its reactions in the anode channel should be done in the future.…”
Section: Discussionmentioning
confidence: 99%
“…With COC, a smaller amount was lost, resulting in a higher pumping efficiency. Moreover, because heat dissipation with COC is less than with a silicon substrate and the vapor pressure increases exponentially with temperature (Neagu et al 2000), the slightly elevated temperature in the reservoirs could help high pumping efficiency. To verify dependency Fig.…”
Section: Electrochemical Pumpingmentioning
confidence: 99%
“…If all of the applied electrical power is converted into the power used in electrolysis, the flow rate will be proportional to the applied current. However, there are many factors that should be considered in electrolysis e.g., recombination of the oxygen and hydrogen, gas permeation to the microfluidic device layers, joule heating and absorption of generated gas by liquid (Neagu et al 1996(Neagu et al , 1997(Neagu et al , 2000. Because all of these factors cannot be easily calculated and fit into the theory, it is useful to calculate efficiency of the pump at each applied current value.…”
Section: Electrochemical Pumpingmentioning
confidence: 99%