2023
DOI: 10.1002/adts.202300371
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The Etching Mechanisms of Diamond, Graphite, and Amorphous Carbon by Hydrogen Plasma: A Reactive Molecular Dynamics Study

Abstract: Understanding how hydrogen plasma etches various potential products during the diamond growth process can contribute to improving the knowledge of diamond growth. However, due to the absence of an in situ characterization technique during the etching process, the complex chemical reactions involved in the process obscure the atomic‐scale etching mechanisms. In this paper, the etching mechanisms of diamond (001), graphite (0001), and amorphous carbon substrates irradiated by hydrogen plasmas are investigated an… Show more

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