The fabrication and characterization of (Pb,Ca)TiO3 pyroelectric thin films with different Ca contents

Chang, C. C.; Lai, Yi-Chun

doi:10.1063/1.2715474

Cited by 12 publications

(8 citation statements)

References 7 publications

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“…Ye et al [16] reported pyroelectric PZT film that was deposited by sol-gel method on p-Si substrate and annealed at 400°C showed a pyroelectric coefficient 50-80 Â 10 À5 C/m 2 K at room temperature. Chang et al [17] showed pyroelectric coefficient of 15 Â 10 À5 C/m 2 K for PCT film that was sputtered on Pt surface and annealed at 650°C. Chopra et al [18] also reported high pyroelectric coefficient of PCT film (433 Â 10 À5 C/m 2 K) that was grown by sol-gel method on ITO surface.…”

Section: Pyroelectric Current Measurements After Polingmentioning

confidence: 99%

Modified lead titanate thin films for pyroelectric infrared detectors on gold electrodes

Ahmed

Butler

2015

Infrared Physics & Technology

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Section: Pyroelectric Current Measurements After Polingmentioning

confidence: 99%

Modified lead titanate thin films for pyroelectric infrared detectors on gold electrodes

Ahmed

Butler

2015

Infrared Physics & Technology

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“…All of the characteristic peaks of PZT, especially the (110) peak, become much stronger and sharper as the annealing temperature increases. The full width at half-maximum (FWHM) is considered in evaluating the quality of the PZT thin film [23,24]. Figure 1(b) indicates the FWHM of the perovskite phase peak (110) as a function of the annealing temperature.…”

Section: Crystalline Phase Of Pzt Thin Filmmentioning

confidence: 99%

Effect of microwave annealing temperatures on lead zirconate titanate thin films

Bhaskar

Chang

et al. 2007

Nanotechnology

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Lead zirconate titanate (Pb(1.1)(Zr(0.52)Ti(0.48))O(3)) thin films of thickness 260 nm on Pt/Ti/SiO(2)/Si substrates were densified by 2.45 GHz microwave annealing. The PZT thin films were annealed at various annealing temperatures from 400 to 700 °C for 30 min. X-ray diffraction showed that the pyrochlore phase was transformed to the perovskite phase at 450 °C and the film was fully crystallized. The secondary (again pyrochlore) phase was observed in the PZT thin films, which were annealed above 550 °C. The surface morphologies were changed above 550 °C of the PZT thin films due to the secondary phase. Higher dielectric constant (ε(r)) and lower dielectric loss coercive field (E(c)) were achieved for the 450 °C film than for the other annealed films.

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“…It has been shown to have a high pyroelectric figure of merit and is considered to be a very good candidate for thin film pyroelectric detector [14,15]. A 30% Ca content was found to deliver the best pyroelectric detector behavior [15]. The addition of Ca decreased the dielectric constant while maintaining relatively the same pyroelectric constant.…”

Section: ∆P=γ∆tmentioning

confidence: 98%

“…Calcium modified lead titanate has received some attention as pyroelectric material because of its better mechanical stability and enhanced sensing properties [13]. It has been shown to have a high pyroelectric figure of merit and is considered to be a very good candidate for thin film pyroelectric detector [14,15]. A 30% Ca content was found to deliver the best pyroelectric detector behavior [15].…”

Section: ∆P=γ∆tmentioning

confidence: 98%

Design of a nano-machined pyroelectric detector for low thermal conductance

2014

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Pyroelectric detector is a class of thermal detector in which the change in temperature causes the change in the spontaneous polarization in the sensing material. In this work, we report the design of uncooled pyroelectric detectors which utilized a nanometer sized truss to support the suspended detector. The design and performance of pyroelectric detectors have been conducted by simulating the structure with Intellisuite™ utilizing Finite Element Method (FEM). The simulated detectors had a spider web-like structure with each of the strut of spider web had a width of 100 nm. Ca modified lead titanate (PCT) was employed as the thermometer because of its high pyroelectric figure of merit. The pyroelectric detectors utilized Ni 0.8 Cr 0.2 absorber, PCT sensing layer, Ti electrodes, Al 2 O 3 structural layer to obtain low thermal conductance between the detector and Si substrate. Three different types of pyroelectric detectors were designed and analyzed. The first design had linear electrode and simple spider web support. The value of the thermal conductance of this detector was found to be 3.9810 -8 W/K. The second design had a longer thermal path than the first one and had a thermal conductivity of 2.4110 -8 W/K. The design was optimized for the best result by modifying the shape, dimension and thickness of various layers namely absorber, electrodes, sensing layer and struts. The thermal conductance of the third design was found to be as low as 4.5710 -9 W/K which is significantly lower than previously reported values. The highest calculated detectivity and reponsivity values were 1.15  10 10 cm Hz 1/2 /W and 4.9  10 7 V/W respectively.

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The fabrication and characterization of (Pb,Ca)TiO3 pyroelectric thin films with different Ca contents

Cited by 12 publications

References 7 publications

Modified lead titanate thin films for pyroelectric infrared detectors on gold electrodes

Modified lead titanate thin films for pyroelectric infrared detectors on gold electrodes

Effect of microwave annealing temperatures on lead zirconate titanate thin films

Design of a nano-machined pyroelectric detector for low thermal conductance

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