2020
DOI: 10.1016/j.pmatsci.2019.100623
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The fate and role of in situ formed carbon in polymer-derived ceramics

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Cited by 302 publications
(254 citation statements)
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“…As a representative PDCs, the polymer derived silicon carbonitride (SiCN) ceramic is composed of the amorphous SiC x N y phase and the free-carbon phase [1,14]. The SiC x N y phase supports most of the load in indentation, while the free carbon supports the load in elastic deformation stage [15,16]. The special heterogeneous microstructure makes the uniform removal extremely di cult, thus leading to the di culty in acquiring ultra-smooth surface.…”
Section: Introductionmentioning
confidence: 99%
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“…As a representative PDCs, the polymer derived silicon carbonitride (SiCN) ceramic is composed of the amorphous SiC x N y phase and the free-carbon phase [1,14]. The SiC x N y phase supports most of the load in indentation, while the free carbon supports the load in elastic deformation stage [15,16]. The special heterogeneous microstructure makes the uniform removal extremely di cult, thus leading to the di culty in acquiring ultra-smooth surface.…”
Section: Introductionmentioning
confidence: 99%
“…For glass and silicon nitride (Si 3 N 4 ) ceramic workpieces, CMP has been successfully applied by using water solution, under polishing environment with pH 7-9, and abrasive with a hardness of approximately 7 Mohs (such as zirconia (ZrO 2 ) and ceria) [18]. In SiCN ceramics, the SiC x N y ceramics phase seems to present a primary contribution to mechanical property on the whole [15,19]. Therefore, similar polishing slurry was used to assess the underlying CMP mechanisms for polishing SiCN-based PDCs.…”
Section: Introductionmentioning
confidence: 99%
“…The higher the I D / I G value, the higher the disorder of free carbon. [ 27 ] As the carbon content in the precursor increased, the I D / I G value was observed to decrease from 4.15 to 2.05, indicating that the structural defects in BCN ceramics were reduced and the structural disorder of free carbon was decreased. Among them, the I D / I G value of BCN‐3 was the lowest, which was attributed to the presence of most carbon atoms in the sp 2 hybridization state, and it was easier to form a complete graphite sheet structure.…”
Section: Resultsmentioning
confidence: 99%
“…However, to date there are still very few reports concerning SiOC-graphite composites and, to the best of our knowledge, no reports concerning the utilization of SiOC/graphite composite for LIC. The main advantage of SiOCs over SiCNs is the higher resistance of the preceramic polymer against oxidation, which facilitates material production [ 45 , 46 ].…”
Section: Introductionmentioning
confidence: 99%