In this corrigendum, we report and correct an error in the calibration procedure of the molecular beam mass spectrometry (MBMS) diagnostics used for measurement of atomic oxygen densities in the effluent of a microscaled atmospheric pressure plasma jet (μ-APPJ) in He/O 2 gas mixture (Ellerweg et al 2010 New J. Phys. 12 013021). The difference in the tuning of the used electron impact ionization mass spectrometer at low electron energy used for O atom detection (E el =18 eV) and for the measurement of the calibration gases CH 4 and Ne (E el =70 eV) has resulted in the underestimation of the O atom densities by a factor of 2.9. The O 3 signal and the signal of its calibration gas (Ar) have been both measured at 70 eV electron energy and O 3 density stays, therefore, unaffected. Updated figures with rescaled O densities corrected according to new MBMS measurements with updated mass spectrometry setup, as well as a detailed description of the calibration procedure, are provided here. The corrected O densities provide much better agreement with the results of the two-photon absorption laser induced fluorescence (TALIF) diagnostic and the corrected MBMS data, the TALIF data, or an average of both should be used in the future for the μ-APPJ source.