2014
DOI: 10.1117/12.2039627
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The formation of hexagonal-shaped InGaN-nanodisk on GaN-nanowire observed in plasma source molecular beam epitaxy

Abstract: We report on the properties and growth kinetics of defect-free, photoluminescence (PL) efficient mushroom-like nanowires (MNWs) in the form of ~30nm thick hexagonal-shaped InGaN-nanodisk on GaN nanowires, coexisting with the conventional rod-like InGaN-on-GaN nanowires (RNWs) on (111)-silicon-substrate. When characterized using confocal microscopy (CFM) with 458nm laser excitation, while measuring spontaneous-emission at fixed detection wavelengths, the spatial intensity map evolved from having uniform pixelat… Show more

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“…Catalyst-free, vertically aligned GaN NWs were grown on an n-Si (111) substrate using PA-MBE (Veeco GEN930). The native oxide on the Si substrate was removed by immersing it in 10% hydrofluoric acid (HF) for 30 s before loading it into the MBE chamber. The growth parameters included a temperature of ∼750 °C, a nitrogen flow rate of 1.0 sccm, a forward plasma power of ∼350 W, and a Ga beam equivalent pressure of ∼6 × 10 –8 Torr.…”
Section: Methodsmentioning
confidence: 99%
“…Catalyst-free, vertically aligned GaN NWs were grown on an n-Si (111) substrate using PA-MBE (Veeco GEN930). The native oxide on the Si substrate was removed by immersing it in 10% hydrofluoric acid (HF) for 30 s before loading it into the MBE chamber. The growth parameters included a temperature of ∼750 °C, a nitrogen flow rate of 1.0 sccm, a forward plasma power of ∼350 W, and a Ga beam equivalent pressure of ∼6 × 10 –8 Torr.…”
Section: Methodsmentioning
confidence: 99%