The future of electrochemical deposition: nanomaterial building blocks

Mandler, Daniel

doi:10.1007/s10008-020-04764-2

Cited by 4 publications

(1 citation statement)

References 12 publications

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“…Thus, there is no physical method that is suitable for the establishment of HAR metallic structures. Fortunately, electrochemical deposition (ECD), which is a process that the metal ions can be reduced and deposited on the cathode, gives a new possibility for the large area fabrication of thick metal [21,22]. And there are HAR architectures with high quality Au have been demonstrated by combining the ECD method and lithography, which shows great potential in plasmonic applications [23][24][25].…”

Section: Introductionmentioning

confidence: 99%

Diversified plasmonic metallic nanostructures with high aspect ratio based on templated electrochemical deposition

Pan¹,

Liu²,

Li³

et al. 2022

J. Micromech. Microeng.

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Metallic high aspect ratio (HAR) nano-architectures provide new opportunities for a series of plasmonic devices due to their additional controllable degrees in height space compared to 2D patterns, but there is no efficient way that suitable for the rapid fabrication of large area HAR structures limited by the processing ability of traditional methods. Here in this work, we have developed a templated electrochemical depositiondiversified plasmonic devices. (ECD) method to fabricateThe templated ECD method is based on the ECD various HAR metallic nano-structuresfilling of the nanopores that are fabricatedforby electron beam lithography. With this templated ECD method, numbers of HAR architectures including nanorods, nanofins and even mushroom-like structures, which have a line width as small as 100 nm and the aspect ratio up to 10:1, are established over a large scale. What’s more, by simultaneously considering the designed layout and edge effect, sub-10 nm nanogap arrays are prepared, whose aspect ratio reaches 100:1 and the gap width reduces to 5 nm. Due to the extreme light confinement ability brought from Fabry-Perot resonance, the HAR nanogaps can be treated as a SERS substrate. FDTD simulation shows that fan-like 10 nm nanogap with a height of 700 nm has the largest light enhancement factor. The configuration optimized nanogap is capable for the sensing of Rhodamine 6G (R6G) with a 10-9M concentration. And the SERSenhancement factor of the nanogap is calculated to be 4×106, indicating the ultrasensitive molecular detection ability of the HAR nanogap. The templated ECD method not only brings a new chance for the construction of HAR metallic 3D structures, but also opens up a new horizon for the design of a series of plasmonic devices.

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