“…A major concern in the reliability of metal-oxide-semiconductor field effect transistor (MOSFET) devices is the formation of interface traps and near-interface oxide traps; called also border traps; under hot carrier injection, irradiation and processing. Traps at or near the semiconductor/gate dielectric interface can cause degraded transconductance (Doyle et al, 1990), the shifting of threshold voltage (Tsuchiya et al, 1987) and may lead to dielectric breakdown (Chen et al, 1985). In order to improve the resistance of MOSFET devices to these effects, it is necessary to have a reliable method of determining the densities of both interface traps and oxide traps (Djezzar et al, 2004).…”