1987
DOI: 10.1002/maco.19870381005
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The growth and structure of oxide films formed on single crystal (100) and polycrystalline Cr between 550 and 900 °C

Abstract: The oxidation of polycrystalline and (100)Cr at temperatures from 550-900°C and 5 x to 5 x lo-' torr oxygen pressure, choosing surface pretreatments such that only adherent. uniform, pore-free polycrystalline a-Cr,O, is produced, show long term parabolic growth kinetics with an activation energy -51 kcal mol-I. Oxide layers, produced by sequential oxidation in '*02 and I6O2. were suitable for the application of polyatomic SIMS to elucidate the extent of oxygen transport in the growing oxides and the mechanism … Show more

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Cited by 41 publications
(4 citation statements)
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“…That this region was comparatively thin, indicates that the oxide layer grew predominantly via outward chromium cation diffusion. This is consistent with previous studies that have found that chromium diffusion is more important than oxygen diffusion for chromia scale growth at 900 °C …”
Section: Discussionsupporting
confidence: 94%
“…That this region was comparatively thin, indicates that the oxide layer grew predominantly via outward chromium cation diffusion. This is consistent with previous studies that have found that chromium diffusion is more important than oxygen diffusion for chromia scale growth at 900 °C …”
Section: Discussionsupporting
confidence: 94%
“…First, partial thermal oxidation of the Cr layer may increase the oxide thickness, since during the fabrication procedure the chromium layer undergoes two heating processes: an elevated temperature in the evaporator chamber during the evaporation process, and PMMA baking for second step lithography (180 • C, 2 min). Thermal oxide growth of Cr x O y primarily takes place through outward cation diffusion; thus new oxide forms mainly on top of the existing scale [21], increasing the resulting oxide layer overhang and gap size. Second, internal stresses generated within the (primarily) Cr layer due to inward diffusion of oxygen [22] may lead to elastic deformation of the underlying Cr.…”
mentioning
confidence: 99%
“…Results for Cr2O3 formed on chromium at 900°C indicate that two independent oxygen diffusion processes occur during oxide growth (12). The first is isotropic oxygen selfdiffusion occurring a t the interface between the 160-and l 8 0 -oxide layers.…”
Section: Chromium Oxidementioning
confidence: 97%