2007
DOI: 10.1016/j.jcrysgro.2006.12.036
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The growth of Pd thin films on a 6H-SiC(0001) substrate

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Cited by 10 publications
(6 citation statements)
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“…The direction of the wafer flat is shown in the SEM micrograph. While it is surprising that epitaxy occurs in the presence of native SiO 2 and the detailed mechanism is unclear, epitaxy in presence of amorphous layer on Si has been reported in earlier studies [25,26]. We may also add that the orientation of crystallites with respect to silicon substrate was independent of orientation of substrate during growth.…”
Section: Resultsmentioning
confidence: 65%
“…The direction of the wafer flat is shown in the SEM micrograph. While it is surprising that epitaxy occurs in the presence of native SiO 2 and the detailed mechanism is unclear, epitaxy in presence of amorphous layer on Si has been reported in earlier studies [25,26]. We may also add that the orientation of crystallites with respect to silicon substrate was independent of orientation of substrate during growth.…”
Section: Resultsmentioning
confidence: 65%
“…Multiple experimental studies have been completed where palladium has been deposited on the surface of SiC and palladium silicides have formed at temperatures as low as 773 K [22][23][24][25]. The palladium silicides generally form islands on the surface of SiC and the carbon forms graphite around the islands [26].…”
Section: Palladium Attack On Sic In Triso Fuelmentioning
confidence: 99%
“…Two papers investigated the {0001} surface in 6H-SiC (Refs. 7,8) which is similar chemically to the {111} in 3C-SiC, yet both of these papers were tested on Si-rich 6H-SiC which is not directly comparable to our surface. With a Si-rich surface a quick reaction is observed between the Pd and Si-rich layers.…”
Section: Palladium Reactionmentioning
confidence: 99%
“…[7][8][9]. At temperatures as low as 500 • C, Pd reacts with SiC to form islands of palladium silicide (predominantly Pd 2 Si) surrounded by amorphous graphite.…”
Section: Introductionmentioning
confidence: 99%