2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432)
DOI: 10.1109/iit.2000.924165
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The Hitachi advanced implanter UI-6000 for SIMOX wafer production

K. Tokiguchi
1
,
T. Seki2,
J. Itou3
et al.
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