The IMGC calibration setup for microdisplacement actuators

Sacconi, A.; Picotto, G. B.; Pasin, W.

doi:10.1109/19.769635

Cited by 14 publications

(8 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…These all are based on the principles discussed in this section. The interaction of the periodic laser interferometer non-linearities with the probe under calibration was further studied by Köning [27] and Sacconi [28]. Also, dedicated laser interferometers been designed that exhibit hardly or no detectable non-linearities [29,30], or systems were designed to compensate these [31][32][33][34].…”

Section: Systems Based On Displacement Laser Interferometermentioning

confidence: 99%

The Calibration of Displacement Sensors

Haitjema

2020

Sensors

View full text Add to dashboard Cite

Displacement measuring sensors play an essential role in all aspects of dimensional metrology. They can be used for direct displacement measurements but more often they are part of a measurement system, such as an atomic force microscope, roughness tester or a coordinate measuring machine (CMM). In order to achieve traceable measurements that can be related to the meter, these sensors must be calibrated against a reference standard that is more noise- and error-free than the sensor under test. A description of the various methods to achieve the ultimate traceability, repeatability and accuracy of such a calibration system is the main part of this paper. Various interferometric methods will be reviewed including several methods that use directly a primary standard as a reference: either an iodine-stabilized laser or a frequency comb. It is shown that various methods exist to quantify or mitigate the periodic errors that are inherent to interferometric methods. Also it is shown that knowledge of this periodicity may lead to a separation of periodic and non-periodic non-linearity errors of both the calibration instrument as the sensor under test. This review is limited to small-range sensors, typically with a range <100 μm. It is concluded that today’s technology enables sound and traceable sensor calibration up to the sub-nano and even picometer level of uncertainties

show abstract

Section: Systems Based On Displacement Laser Interferometermentioning

confidence: 99%

The Calibration of Displacement Sensors

Haitjema

2020

Sensors

View full text Add to dashboard Cite

show abstract

“…Experimental results show an expanded uncertainty of about 0.7 nm + 0.1× 10 −3 L. The calibrated actuator is then used as a transfer standard at the nanometer level, both for testing the nonlinearity of the laser interferometer and for calibrating the linear variable differential transformer probe (Line Standards) of the National Institute of Standards (Egypt), [10][11][12].…”

Section: Calibration Using Optical Interferometrymentioning

confidence: 99%

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

Naeim¹,

Khodier²

2012

Int. J. Metrol. Qual. Eng.

View full text Add to dashboard Cite

Abstract. In order to achieve nanometer accuracy, metrologists need to identify the sources of error and develop solutions to eradicate or minimize their effects. A stabilized low power dual-frequency laser heterodyne interferometer (ZMI-1000A) designed to measure linear and angular displacement with nominal measurement resolution 1.24 nm and 0.0025 arcsec, respectively, is used to achieve measurement of displacements over different travelling axes by comparison with the electronically reference measurements of the stage over wide range 500 mm. The repeatability and reversal error of linear stage over the working distance have agreed opto-electronically and the positioning uncertainty been reduced. A multivariable framework was implemented for the x-axis due to the cross coupling between the forward and backward course of the linear stage. Thermal error reduction is achieved using environmental temperature control (20 ± 0.2 • C) to help reduce thermal errors.

show abstract

“…The periodic nonlinearity due to the unequal intensity and out-of-quadrature of the sin/cos signals in the homodyne interferometers and to the optical mixing of the two beam frequency components in the two arms of the heterodyne interferometer is the most important error source with measurements in the nanometric range. Much work has been done in the last decades to improve interferometer performance by reducing the nonlinearity effects [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16]. Proposed methods are based on refined optical paths which minimize or nullify polarization mixing, on numeric or electronic techniques to compensate for nonlinearities, on integration of a capacitive sensor to interpolate the optical fringes, and on the use of a tunable laser in order to operate at fixed phase.…”

Section: Introductionmentioning

confidence: 99%

A homodyne Michelson interferometer with sub-picometer resolution

Pisani

2009

Meas. Sci. Technol.

View full text Add to dashboard Cite

A homodyne interferometer which exploits a multiple reflection arrangement between two quasi parallel mirrors to deliver a multiplication factor is presented. The relative displacement of the two mirrors causes a more than 100-fold increment of the optical path, which is measured by the optoelectronic circuitry. This leads to a proportional reduction of the errors associated with the subdivision of the optical fringes, with the effect of fringe nonlinearities, and with the opto-electronic noise. In particular the reduction of the electronic noise limit to the level of 20 fm Hz −1/2 has been demonstrated. The exact formula of the gain has been calculated and confirmed experimentally.

show abstract

The IMGC calibration setup for microdisplacement actuators

Cited by 14 publications

References 4 publications

The Calibration of Displacement Sensors

The Calibration of Displacement Sensors

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

A homodyne Michelson interferometer with sub-picometer resolution

Contact Info

Product

Resources

About