Recently, with the dual constraints of resources and environment, to accelerate the transformation of low-carbon energy driven by energy technology innovation has become a global development trend. On account of the provincial data during the period of 2000 to 2017, we creatively incorporate the ecological footprint into the measurement of total factor ecological efficiency so as to infer the coordinated development level of 3E system more precisely. In this paper, the dynamic spatial impact of energy technological innovation on regional total factor eco-efficiency is explored through the spatial Durbin model, and the complex nonlinear relationship between the two is further probed by constructing the panel threshold model. The following conclusions are obtained ultimately. First of all, both China's provincial ecological efficiency and energy technology innovation activities possess significant spatial positive correlation, which manifests as the spatial geographical distribution agglomerated by the similar characteristics; Secondly, the regional energy technology innovation has a remarkable spatial effect on ecological efficiency, which displays a U-shaped trend. And compared with the direct effect, the spatial spillover effect is more intense, along with more stronger long-term influence; Finally, taking the level of regional economic development as the moderating variable, the impact of energy technology innovation on eco-efficiency emerges a conspicuous threshold effect with two threshold values. Only when the level of economic development crosses the double threshold, can energy technology innovation activities significantly improve the regional total factor ecological efficiency. After the robustness test and discussion of the empirical model, relevant policy suggestions are put forward based on the conclusions of the paper.